Synthesis of Diamond-like Carbon Films by Nanopulse Plasma Chemical Vapor Deposition at Subatmospheric Pressure
Ohtake, Naoto, Saito, Takao, Kondo, Yoshimasa, Hosono, Shintaro, Nakamura, Yukinori, Imanishi, Yu-ichiro
Published in Japanese Journal of Applied Physics (01.11.2004)
Published in Japanese Journal of Applied Physics (01.11.2004)
Get full text
Journal Article