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"Im, Myeong-Sik"
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Effect of Fluoride Ions on Wet Etching of Copper/ Molybdenum in Hydrogen Peroxide Solution
by
Kim, Jeong-Hyeon
,
Bae, Jin-Won
,
Park, Jae-Young
,
Im
,
Myeong
-
Sik
,
Kim, Byoung-O
,
Seo, Jong-Hyun
Published in
Journal of nanoscience and nanotechnology
(01.03.2019)
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Journal Article
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chemistry
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engineering
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physics
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Topic
amorphous silicon
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chemistry
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chemistry, multidisciplinary
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copper
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copper thin films
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etchants
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English
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PubMed
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