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MEMS Electrostatic Energy Harvester Developed by Simultaneous Process for Anodic Bonding and Electret Charging
by
Honma, Hiroaki
,
Ikeno
,
Sho
,
Toshiyoshi, Hiroshi
Published in
Sensors and materials
(01.01.2023)
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Equivalent Circuit Model for MEMS Vibrational Energy Harvester Compatible with Sinusoidal and Nonsinusoidal Vibrations
by
Honma, Hiroaki
,
Tohyama, Yukiya
,
Ikeno
,
Sho
,
Toshiyoshi, Hiroshi
Published in
Sensors and materials
(31.07.2020)
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engineering
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electret
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energy harvesting
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general materials science
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instrumentation
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