Spatio-temporal measurements Ar 2p1 excitation rates and optical emission spectroscopy by capacitively coupled Ar and Ne mixed gas plasma
Otaka, Michihiro, Arima, Toshiaki, Lai, Jiansyun, Ikeda, Kizuki, Kamataki, Kunihiro, Yamashita, Naoto, Okumura, Takamasa, Itagaki, Naho, Koga, Kazunori, Shiratani, Masaharu
Published in MRS advances (11.07.2022)
Published in MRS advances (11.07.2022)
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