Plasma Dry Process Technology Development of Glass-Epoxy Film on the Silicon Substrate to Fabricate RDL for Future GPU/AI Application
Murayama, Takahide, Sato, Muneyuki, Suzuki, Akiyoshi, Ihori, Atsuhito, Fujinaga, Tetsushi, Morikawa, Yasuhiro
Published in 2019 IEEE 69th Electronic Components and Technology Conference (ECTC) (01.05.2019)
Published in 2019 IEEE 69th Electronic Components and Technology Conference (ECTC) (01.05.2019)
Get full text
Conference Proceeding
성막 장치 및 성막 방법
IWAI HARUNORI, FUJINAGA TETSUSHI, TANI NORIAKI, IHORI ATSUHITO, KOBAYASHI YOUSUKE
Year of Publication 04.12.2018
Get full text
Year of Publication 04.12.2018
Patent
FILM-FORMING APPARATUS AND FILM-FORMING METHOD
IHORI, Atsuhito, TANI, Noriaki, IWAI, Harunori, FUJINAGA, Tetsushi, KOBAYASHI, Yousuke
Year of Publication 05.10.2017
Get full text
Year of Publication 05.10.2017
Patent
SUBSTRATE PROCESSING DEVICE
IWAI HARUNORI, FUJINAGA TETSUSHI, TANI NORIAKI, IHORI ATSUHITO, MATSUMOTO MASAHIRO
Year of Publication 31.03.2017
Get full text
Year of Publication 31.03.2017
Patent
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
IWAI HARUNORI, FUJINAGA TETSUSHI, TANI NORIAKI, IHORI ATSUHITO, MATSUMOTO MASAHIRO
Year of Publication 31.03.2017
Get full text
Year of Publication 31.03.2017
Patent
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
IWAI, HARUNORI, FUJINAGA, TETSUSHI, MATSUMOTO, MASAHIRO, IHORI, ATSUHITO, TANI, NORIAKI
Year of Publication 04.02.2016
Get full text
Year of Publication 04.02.2016
Patent
SUBSTRATE PROCESSING DEVICE
IWAI, HARUNORI, FUJINAGA, TETSUSHI, MATSUMOTO, MASAHIRO, IHORI, ATSUHITO, TANI, NORIAKI
Year of Publication 04.02.2016
Get full text
Year of Publication 04.02.2016
Patent
SUBSTRATE PROCESSING DEVICE
IWAI HARUNORI, IWATA KENJI, SATO YOSHINAO, FUJINAGA TETSUSHI, TANI NORIAKI, IHORI ATSUHITO, MATSUMOTO MASAHIRO
Year of Publication 16.08.2017
Get full text
Year of Publication 16.08.2017
Patent
SUBSTRATE PROCESSING DEVICE
IHORI, Atsuhito, IWATA, Kenji, MATSUMOTO, Masahiro, TANI, Noriaki, SATO, Yoshinao, IWAI, Harunori, FUJINAGA, Tetsushi
Year of Publication 05.01.2017
Get full text
Year of Publication 05.01.2017
Patent
TOUCH PANEL METHOD FOR MANUFACTURING TOUCH PANEL AND OPTICAL THIN FILM
HARADA MANABU, YANAGITSUBO HIDENORI, KUBO MASASHI, TANI NORIAKI, IHORI ATSUHITO, SUZUKI TOSHIHIRO, MATSUMOTO MASAHIRO
Year of Publication 02.12.2016
Get full text
Year of Publication 02.12.2016
Patent
TOUCH PANEL, METHOD FOR MANUFACTURING TOUCH PANEL AND OPTICAL THIN FILM
HARADA MANABU, YANAGITSUBO HIDENORI, KUBO MASASHI, TANI NORIAKI, IHORI ATSUHITO, SUZUKI TOSHIHIRO, MATSUMOTO MASAHIRO
Year of Publication 05.11.2015
Get full text
Year of Publication 05.11.2015
Patent
THIN SUBSTRATE PROCESSING DEVICE
IWAI HARUNORI, TAKAHASHI KOJI, FUJINAGA TETSUSHI, MASE ERIKO, IHORI ATSUHITO, ARAI MAKOTO, MATSUMOTO MASAHIRO
Year of Publication 31.07.2015
Get full text
Year of Publication 31.07.2015
Patent
Novel plasma process for build-up film in the fine wiring fabrication
Hironiwa, Daisuke, Morikawa, Yasuhiro, Ihori, Atsuhito, Kamimura, Ryuichiro
Published in 2022 IEEE 72nd Electronic Components and Technology Conference (ECTC) (01.05.2022)
Published in 2022 IEEE 72nd Electronic Components and Technology Conference (ECTC) (01.05.2022)
Get full text
Conference Proceeding
THIN SUBSTRATE PROCESSING DEVICE
IWAI, HARUNORI, FUJINAGA, TETSUSHI, MATSUMOTO, MASAHIRO, IHORI, ATSUHITO, TAKAHASHI, KOJI, MASE, ERIKO, ARAI, MAKOTO
Year of Publication 07.08.2014
Get full text
Year of Publication 07.08.2014
Patent
FILM-FORMING APPARATUS AND FILM-FORMING METHOD
IHORI, Atsuhito, TANI, Noriaki, IWAI, Harunori, FUJINAGA, Tetsushi, KOBAYASHI, Yousuke
Year of Publication 13.10.2021
Get full text
Year of Publication 13.10.2021
Patent
Film-forming apparatus and film-forming method
Ihori, Atsuhito, Kobayashi, Yousuke, Iwai, Harunori, Tani, Noriaki, Fujinaga, Tetsushi
Year of Publication 07.09.2021
Get full text
Year of Publication 07.09.2021
Patent
FILM-FORMING APPARATUS AND FILM-FORMING METHOD
IHORI, Atsuhito, TANI, Noriaki, IWAI, Harunori, FUJINAGA, Tetsushi, KOBAYASHI, Yousuke
Year of Publication 06.11.2019
Get full text
Year of Publication 06.11.2019
Patent
FILM-FORMING APPARATUS AND FILM-FORMING METHOD
IHORI, Atsuhito, TANI, Noriaki, IWAI, Harunori, FUJINAGA, Tetsushi, KOBAYASHI, Yousuke
Year of Publication 06.02.2019
Get full text
Year of Publication 06.02.2019
Patent