Room temperature bonding of SiO2 and SiO2 by surface activated bonding method using Si ultrathin films
Utsumi, Jun, Ide, Kensuke, Ichiyanagi, Yuko
Published in Japanese Journal of Applied Physics (01.02.2016)
Published in Japanese Journal of Applied Physics (01.02.2016)
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Journal Article
Electrical and Photoconductive Properties at 1.8 K of Germanium p+--i Junction Device Fabricated by Surface-Activated Wafer Bonding
Kaneda, Hidehiro, Wada, Takehiko, Oyabu, Shinki, Kano, Ryoko, Kiriyama, Yuichi, Hattori, Yasuki, Suzuki, Toyoaki, Ide, Kensuke, Kato, Masahiro, Watanabe, Kentaroh
Published in Japanese Journal of Applied Physics (01.06.2011)
Published in Japanese Journal of Applied Physics (01.06.2011)
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Journal Article
Electrical and Photoconductive Properties at 1.8 K of Germanium p + –i Junction Device Fabricated by Surface-Activated Wafer Bonding
Kaneda, Hidehiro, Wada, Takehiko, Oyabu, Shinki, Kano, Ryoko, Kiriyama, Yuichi, Hattori, Yasuki, Suzuki, Toyoaki, Ide, Kensuke, Kato, Masahiro, Watanabe, Kentaroh
Published in Japanese Journal of Applied Physics (01.06.2011)
Published in Japanese Journal of Applied Physics (01.06.2011)
Get full text
Journal Article
Room temperature bonding of SiO 2 and SiO 2 by surface activated bonding method using Si ultrathin films
Utsumi, Jun, Ide, Kensuke, Ichiyanagi, Yuko
Published in Japanese Journal of Applied Physics (01.02.2016)
Published in Japanese Journal of Applied Physics (01.02.2016)
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Journal Article
반도체 장치의 제조 방법 및 상온 접합 장치
TSUTSUMI KEIICHIRO, IDE KENSUKE, GOTO TAKAYUKI, SUZUKI TAKENORI, TAKIGAWA RYO, TAKAKURA RYO
Year of Publication 11.01.2024
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Year of Publication 11.01.2024
Patent
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE AND ATMOSPHERIC TEMPERATURE BONDING APPARATUS
TSUTSUMI KEIICHIRO, IDE KENSUKE, GOTO TAKAYUKI, SUZUKI TAKENORI, TAKIGAWA RYO, TAKAKURA RYO
Year of Publication 10.11.2022
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Year of Publication 10.11.2022
Patent
SEMICONDUCTOR DEVICE MANUFACTURING METHOD, AND ROOM TEMPERATURE BONDING DEVICE
TAKIGAWA Ryo, GOTO Takayuki, TSUTSUMI Keiichiro, SUZUKI Takenori, TAKAKURA Ryo, IDE Kensuke
Year of Publication 03.11.2022
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Year of Publication 03.11.2022
Patent
MANUFACTURING METHOD OF JOINT SUBSTRATE AND JOINT SUBSTRATE
KURASHIMA YUICHI, IDE KENSUKE, UCHIUMI ATSUSHI, TAKAGI HIDEKI, GOTO TAKAYUKI, SUZUKI TAKENORI
Year of Publication 26.12.2019
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Year of Publication 26.12.2019
Patent