n-Type doping of diamond by hot-filament chemical vapor deposition growth with phosphorus incorporation
Katamune, Yūki, Mori, Daichi, Arikawa, Daisuke, Izumi, Akira, Shimaoka, Takehiro, Ichikawa, Kimiyoshi, Koizumi, Satoshi
Published in Applied physics. A, Materials science & processing (01.11.2020)
Published in Applied physics. A, Materials science & processing (01.11.2020)
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Journal Article
Low-temperature silicon oxidation using oxidizing radicals produced by catalytic decomposition of H2O/H2 on heated tungsten wire
Katamune, Y ki, Negi, Takanobu, Tahara, Shinichi, Fukushima, Kazuya, Izumi, Akira
Published in Japanese Journal of Applied Physics (24.10.2018)
Published in Japanese Journal of Applied Physics (24.10.2018)
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Journal Article
Deposition of SiCN films using organic liquid materials by HWCVD method
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Conference Proceeding
Ultra thin silicon nitride prepared by direct nitridation using ammonia decomposed species
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Journal Article
Conference Proceeding
Development of Disaster Prevention Support System for Irrigation Pond (DPSIP)
Hori, Toshikazu, Izumi, Akira, Shoda, Daisuke, Shigeoka, Tetsushi, Yoshisako, Hiroshi
Published in Journal of disaster research (01.03.2019)
Published in Journal of disaster research (01.03.2019)
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Journal Article
Axial Behavior of Buried Rehabilitated Pipe in Liquefaction Ground
Izumi, Akira, Ono, Kohei, Takahara, Syo, Sawada, Yutaka, Kawabata, Toshinori
Published in Transportation infrastructure geotechnology (01.06.2016)
Published in Transportation infrastructure geotechnology (01.06.2016)
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Journal Article
A New Cleaning Technology Using the Effect of Freezing Water on Wafer Surface
Miya, Katsuhiko, Fujiwara, Naozumi, Kato, Masahiko, Izumi, Akira
Published in ECS transactions (04.10.2011)
Published in ECS transactions (04.10.2011)
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Journal Article
Surface modification of silicon related materials using a catalytic CVD system for ULSI applications
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Journal Article
Conference Proceeding
Recent progress of Cat-CVD research in Japan—bridging between the first and second Cat-CVD conferences
Matsumura, Hideki, Umemoto, Hironobu, Izumi, Akira, Masuda, Atsushi
Published in Thin solid films (22.04.2003)
Published in Thin solid films (22.04.2003)
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Journal Article
Conference Proceeding
Novel chamber cleaning method using atomic hydrogen generated by hot catalyzer
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Journal Article
Conference Proceeding
Heavy phosphorus doping of diamond by hot-filament chemical vapor deposition
Katamune, Yūki, Izumi, Akira, Ichikawa, Kimiyoshi, Koizumi, Satoshi
Published in Diamond and related materials (01.04.2023)
Published in Diamond and related materials (01.04.2023)
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Journal Article
Application of decomposed species generated by a heated catalyzer to ULSI fabrication processes
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Journal Article
Conference Proceeding
Control of the chemical composition of silicon carbon nitride films formed from hexamethyldisilazane in H2/NH3 mixed gas atmospheres by hot-wire chemical vapor deposition
Katamune, Yūki, Mori, Hiroto, Morishita, Fumihiro, Izumi, Akira
Published in Thin solid films (01.02.2020)
Published in Thin solid films (01.02.2020)
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