IR sensitivity enhancement of CMOS Image Sensor with diffractive light trapping pixels
Yokogawa, Sozo, Oshiyama, Itaru, Ikeda, Harumi, Ebiko, Yoshiki, Hirano, Tomoyuki, Saito, Suguru, Oinoue, Takashi, Hagimoto, Yoshiya, Iwamoto, Hayato
Published in Scientific reports (19.06.2017)
Published in Scientific reports (19.06.2017)
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Journal Article
Structural and electrical characteristics of ion-induced Si damage during atomic layer etching
Hirata, Akiko, Fukasawa, Masanaga, Kugimiya, Katsuhisa, Karahashi, Kazuhiro, Hamaguchi, Satoshi, Hagimoto, Yoshiya, Iwamoto, Hayato
Published in Japanese Journal of Applied Physics (01.07.2022)
Published in Japanese Journal of Applied Physics (01.07.2022)
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Journal Article
High-throughput SiN ALE: surface reaction and ion-induced damage generation mechanisms
Hirata, Akiko, Fukasawa, Masanaga, Tercero, Jomar Unico, Kugimiya, Katsuhisa, Hagimoto, Yoshiya, Karahashi, Kazuhiro, Hamaguchi, Satoshi, Iwamoto, Hayato
Published in Japanese Journal of Applied Physics (01.07.2023)
Published in Japanese Journal of Applied Physics (01.07.2023)
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Journal Article
Development of face-to-face and face-to-back ultra-fine pitch Cu-Cu hybrid bonding
Kagawa, Yoshihisa, Kamibayashi, Takumi, Yamano, Yuriko, Nishio, Kenya, Sakamoto, Akihisa, Yamada, Taichi, Shimizu, Kan, Hirano, Tomoyuki, Iwamoto, Hayato
Published in 2022 IEEE 72nd Electronic Components and Technology Conference (ECTC) (01.01.2022)
Published in 2022 IEEE 72nd Electronic Components and Technology Conference (ECTC) (01.01.2022)
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Conference Proceeding
Band-Edge High-Performance Metal-Gate/High- \kappa nMOSFET Using \hbox\hbox/\hbox Stack
Ando, T., Hirano, T., Tai, K., Yamaguchi, S., Yoshida, S., Iwamoto, H., Kadomura, S., Watanabe, H.
Published in IEEE transactions on electron devices (01.12.2009)
Published in IEEE transactions on electron devices (01.12.2009)
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Journal Article
Atmospheric In situ Arsenic-Doped SiGe Selective Epitaxial Growth for Raised-Extension N-type Metal–Oxide–Semiconductor Field-Effect Transistor
Ikuta, Tetsuya, Miyanami, Yuki, Fujita, Shigeru, Iwamoto, Hayato, Kadomura, Shingo, Shimura, Takayoshi, Watanabe, Heiji, Yasutake, Kiyoshi
Published in Japanese Journal of Applied Physics (01.04.2007)
Published in Japanese Journal of Applied Physics (01.04.2007)
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Journal Article
Effect of Post-Etch Wet Cleaning on GaAs Surfaces
Hirano, Tomoki, Saito, Suguru, Iwamoto, Hayato, Hagimoto, Yoshiya
Published in Solid state phenomena (14.08.2023)
Published in Solid state phenomena (14.08.2023)
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Journal Article
Heavy arsenic doping of silicon grown by atmospheric pressure selective epitaxial chemical vapor deposition
Ikuta, Tetsuya, Miyanami, Yuki, Fujita, Shigeru, Iwamoto, Hayato, Kadomura, Shingo, Shimura, Takayoshi, Watanabe, Heiji, Yasutake, Kiyoshi
Published in Science and technology of advanced materials (01.01.2007)
Published in Science and technology of advanced materials (01.01.2007)
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Journal Article
Threshold Voltage Modulation Technique using Fluorine Treatment through Atomic Layer Deposition TiN Suitable for Complementary Metal–Oxide–Semiconductor Devices
Tai, Kaori, Yamaguchi, Shinpei, Tanaka, Kazuki, Hirano, Tomoyuki, Oshiyama, Itaru, Kazi, Salam, Ando, Takashi, Nakata, Masashi, Yamanaka, Mayumi, Yamamoto, Ryo, Kanda, Sayuri, Tateshita, Yasushi, Wakabayashi, Hitoshi, Tagawa, Yukio, Tukamoto, Masanori, Iwamoto, Hayato, Saito, Masaki, Nagashima, Naoki, Kadomura, Shingo
Published in Japanese Journal of Applied Physics (01.04.2008)
Published in Japanese Journal of Applied Physics (01.04.2008)
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Journal Article
Modeling and simulation of coverage and film properties in deposition process on large-scale pattern using statistical ensemble method
Kuboi, Nobuyuki, Matsugai, Hiroyasu, Tatsumi, Tetsuya, Kobayashi, Shoji, Hagimoto, Yoshiya, Iwamoto, Hayato
Published in Japanese Journal of Applied Physics (01.07.2023)
Published in Japanese Journal of Applied Physics (01.07.2023)
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Journal Article
(Invited) Bonding Strength of Cu-Cu Hybrid Bonding for 3D Integration Process
Fujii, Nobutoshi, Furuse, Shunsuke, Yoshioka, Hirotaka, Ogawa, Naoki, Yamada, Taichi, Hirano, Takaaki, Saito, Suguru, Hagimoto, Yoshiya, Iwamoto, Hayato
Published in ECS transactions (29.09.2023)
Published in ECS transactions (29.09.2023)
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Journal Article
Five-step plasma-enhanced atomic layer etching of silicon nitride with a stable etched amount per cycle
Hirata, Akiko, Fukasawa, Masanaga, Tercero, Jomar U., Kugimiya, Katsuhisa, Hagimoto, Yoshiya, Karahashi, Kazuhiro, Hamaguchi, Satoshi, Iwamoto, Hayato
Published in Japanese Journal of Applied Physics (01.06.2022)
Published in Japanese Journal of Applied Physics (01.06.2022)
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Journal Article
8.3 M-Pixel 480-fps Global-Shutter CMOS Image Sensor with Gain-Adaptive Column ADCs and Chip-on-Chip Stacked Integration
Oike, Yusuke, Akiyama, Kentaro, Hung, Luong D., Niitsuma, Wataru, Kato, Akihiko, Sato, Mamoru, Kato, Yuri, Nakamura, Wataru, Shiroshita, Hiroshi, Sakano, Yorito, Kitano, Yoshiaki, Nakamura, Takuya, Toyama, Takayuki, Iwamoto, Hayato, Ezaki, Takayuki
Published in IEEE journal of solid-state circuits (01.04.2017)
Published in IEEE journal of solid-state circuits (01.04.2017)
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Journal Article
Characterization of Wet Chemical Atomic Layer Etching of InGaAs
Hirano, Tomoki, Fukatani, Takashi, Saito, Suguru, Iwamoto, Hayato, Nishio, Kenya, Hagimoto, Yoshiya
Published in Solid state phenomena (01.02.2021)
Published in Solid state phenomena (01.02.2021)
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Journal Article
Analysis of Surface Reaction for Group III-V Compound Semiconductors in Functional Water
Nishio, Kenya, Hagimoto, Yoshiya, Oinoue, Takashi, Saito, Suguru, Ida, Junichi, Iwamoto, Hayato, Ogawa, Yuichi
Published in Solid state phenomena (01.02.2021)
Published in Solid state phenomena (01.02.2021)
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Journal Article
Effect of WET treatment on Group III-V Compound Semiconductor Surface
Saito, Suguru, Iwamoto, Hayato, Nishio, Kenya, Hagimoto, Yoshiya
Published in Solid state phenomena (01.08.2018)
Published in Solid state phenomena (01.08.2018)
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Journal Article
Behavior Analysis of Si Etching Process with HF/HNO3 Mixture in Single-Spin Wafer Process
Saito, Suguru, Iwamoto, Hayato, Hagimoto, Yoshiya, Oinoue, Takashi, Okuyama, Atsushi
Published in Solid state phenomena (01.08.2018)
Published in Solid state phenomena (01.08.2018)
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Journal Article
SEMICONDUCTOR DEVICE METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND ELECTRONIC APPARATUS
OOKA YUTAKA, KOMAI NAOKI, OINOUE TAKASHI, NAGATA MASAYA, SASAKI NAOTO, IWAMOTO HAYATO, OGAWA NAOKI
Year of Publication 08.02.2022
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Year of Publication 08.02.2022
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