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Year of Publication 31.05.2022
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Plasma-enhanced anneal chamber for wafer outgassing
Chan, Kong Lung Samuel, Iu, Dongming, Hawrylchak, Lara, Spuller, Matthew, Scotney-Castle, Matthew D, Tam, Norman L
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Semiconductor processing chamber
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Thermal cooling member with low temperature control
Aderhold, Wolfgang R, Hu, Ji-Dih, Liu, Michael, Iu, Dongming, Hawrylchak, Lara, Howells, Samuel C, Tam, Norman L, Tertitski, Leonid M
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Year of Publication 25.02.2020
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Quartz upper and lower domes
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Year of Publication 19.09.2017
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Year of Publication 19.09.2017
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