OPTIMAL DETERMINATION OF AN OVERLAY TARGET USING MACHINE LEARNING
HOUCHENS KEVIN RYAN, ITZKOVICH TAL, PERRY JENNY, LEVANT BORIS, HSIEH TUNG YUAN, YACOBY RAN, DUBOVSKI BAR, BOMSHTEIN NAHUM
Year of Publication 30.08.2024
Get full text
Year of Publication 30.08.2024
Patent
OPTIMAL DETERMINATION OF AN OVERLAY TARGET
GOPINATHAN MOHAN, ITZKOVICH TAL, HOUCHENS KEVIN RYAN, PERRY JENNY, SHENOY RAHUL, MANAPARAMBIL ARJUN DAS, BALODHI JATIN, BOMSHTEIN NAHUM
Year of Publication 30.08.2024
Get full text
Year of Publication 30.08.2024
Patent
METHOD FOR DIRECTED SELF-ASSEMBLY IN TARGET DESIGN AND PRODUCTION
ITZKOVICH TAL, VOLKOVICH ROIE, AMIR NURIEL, CHOI DONGSUB, AMIT ERAN, RAVIV YOHANAN
Year of Publication 27.06.2019
Get full text
Year of Publication 27.06.2019
Patent
스캐테로메트리 계측에서의 공정 변동의 근본 원인 분석
GHINOVKER MARK, BRINGOLTZ BARAK, ITZKOVICH TAL, RAMANATHAN VIDYA, CAMP JANAY, KLEIN DANA, MARCIANO TAL, ADEL MICHAEL E
Year of Publication 11.10.2018
Get full text
Year of Publication 11.10.2018
Patent
필 팩터 변조에 의한 공정 호환성 개선
HAJAJ EITAN, PASKOVER YURI, AHARON SHARON, ITZKOVICH TAL, MANASSEN AMNON, LEVINSKI VLADIMIR, NEGRI DARIA, SMITH MARK D, LEE MYUNGJUN, LUBASHEVSKY YUVAL, ADEL MICHAEL E
Year of Publication 14.11.2018
Get full text
Year of Publication 14.11.2018
Patent
DIRECT SELF ASSEMBLY IN TARGET DESIGN AND PRODUCTION
ITZKOVICH TAL, VOLKOVICH ROIE, AMIR NURIEL, AMIT ERAN, YOHANAN RAVIV, DONGSUB CHOI
Year of Publication 23.12.2015
Get full text
Year of Publication 23.12.2015
Patent
계측 시스템에서의 계측 데이터의 피드 포워드
BRINGOLTZ BARAK, LEVY ADY, ITZKOVICH TAL, POSLAVSKY LEONID, ROBINSON JOHN, KANDEL DANIEL, WAGNER MARK, ADEL MICHAEL E, RAMANATHAN VIDYA, GRUNZWEIG TZAHI, AMIR NURIEL, CAMP JANAY, KLEIN DANA, MARCIANO TAL, CARMEL NADAV
Year of Publication 11.12.2017
Get full text
Year of Publication 11.12.2017
Patent
OPTIMAL DETERMINATION OF AN OVERLAY TARGET USING MACHINE LEARNING
HOUCHENS, Kevin Ryan, BOMSHTEIN, Nahum, PERRY, Jenny, DUBOVSKI, Bar, YACOBY, Ran, HSIEH, Tung-Yuan, LEVANT, Boris, ITZKOVICH, Tal
Year of Publication 29.08.2024
Get full text
Year of Publication 29.08.2024
Patent
OPTIMAL DETERMINATION OF AN OVERLAY TARGET
HOUCHENS, Kevin Ryan, BOMSHTEIN, Nahum, GOPINATHAN, Mohan, PERRY, Jenny, BALODHI, Jatin, MANAPARAMBIL, Arjun Das, SHENOY, Rahul, ITZKOVICH, Tal
Year of Publication 29.08.2024
Get full text
Year of Publication 29.08.2024
Patent
PROCESS COMPATIBILITY IMPROVEMENT BY FILL FACTOR MODULATION
AHARON, Sharon, HAJAJ, Eitan, LEVINSKI, Vladimir, NEGRI, Daria, LEE, Myungjun, ADEL, Michael E, PASKOVER, Yuri, MANASSEN, Amnon, SMITH, Mark D, ITZKOVICH, Tal, LUBASHEVSKY, Yuval
Year of Publication 06.03.2024
Get full text
Year of Publication 06.03.2024
Patent
Compound imaging metrology targets
Yohanan, Raviv, Amit, Eran, Itzkovich, Tal, Ghinovker, Mark, Amir, Nuriel
Year of Publication 07.01.2020
Get full text
Year of Publication 07.01.2020
Patent
Method and apparatus for direct self assembly in target design and production
Yohanan, Raviv, Choi, Dongsub, Amit, Eran, Itzkovich, Tal, Amir, Nuriel, Volkovich, Roie
Year of Publication 28.05.2019
Get full text
Year of Publication 28.05.2019
Patent
Optimal determination of overlay targets using machine learning
DUBOVSKY, BAL, PERRY JEANNE, BAMSHEIN, NAHUM, HUSHENS, KEVIN, RYAN, LEVANT BORIS, XIE DONGYUAN, TAL ITZKOVICH, YACOBI, RAN
Year of Publication 23.08.2024
Get full text
Year of Publication 23.08.2024
Patent
Optimal determination of overlapping targets
HOUCHENS, KEVIN, RYAN, PERRY JEANNE, SHENOY, RAHUL, MANAPARAMBIL, ARJUN, DAS, GOPINATHAN, MOHAN, TAL ITZKOVICH, BOMSTEIN NAHUM, BARODI, JADINE
Year of Publication 23.08.2024
Get full text
Year of Publication 23.08.2024
Patent
ANALYZING ROOT CAUSES OF PROCESS VARIATION IN SCATTEROMETRY METROLOGY
MARCIANO, Tal, KLEIN, Dana, RAMANATHAN, Vidya, GHINOVKER, Mark, BRINGOLTZ, Barak, CAMP, Janay, ADEL, Michael, E, ITZKOVICH, Tal
Year of Publication 16.10.2019
Get full text
Year of Publication 16.10.2019
Patent