FERROELECTRIC CAPACITOR WITH A COMPLEX-OXIDE HARD-MASK TOP ELECTRODE AND METHOD FOR MANUFACTURING THE SAME
ARISUMI, OSAMU, ITOKAWA, HIROSHI, NATORI, KATSUAKI, TOMIOKA, KAZUHIRO, EGGER, ULRICH, KANAYA, HIROYUKI, TANIGUCHI, YASUYUKI, YAMAZAKI, SOICHI, YAMAKAWA, KOJI, NAKAZAWA, KEISUKE
Year of Publication 02.06.2005
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Year of Publication 02.06.2005
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MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE
ITOKAWA, HIROSHI, ARISUMI, OSAMU, NATORI, KATSUAKI, MOON, BUM-KI, IMAI, KEITARO, YAMAKAWA, KOJI, NAKAZAWA, KEISUKE
Year of Publication 28.04.2005
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Year of Publication 28.04.2005
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SEMICONDUCTOR DEVICE AND ITS MANUFACTURING PROCESS
YAMAKAWA KOJI, NAKAZAWA HIROSUKE, ARISUMI OSAMU, NATORI KATSUAKI, ITOKAWA HIROSHI, TANIGUCHI YASUYUKI, TOMIOKA KAZUHIRO, KANETANI HIROYUKI, EGGER ULRICH, YAMAZAKI SOICHI
Year of Publication 21.04.2005
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Year of Publication 21.04.2005
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Semiconductor device and method for manufacturing the same
YAMAKAWA KOJI, ARISUMI OSAMU, NATORI KATSUAKI, ITOKAWA HIROSHI, TOMIOKA KAZUHIRO, TANIGUCHI YASUYUKI, EGGER ULI, NAKAZAWA KEISUKE, KANAYA HIROYUKI, YAMAZAKI SOICHI
Year of Publication 31.03.2005
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Year of Publication 31.03.2005
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Manufacturing method of semiconductor device
YAMAKAWA KOJI, ARISUMI OSAMU, NATORI KATSUAKI, ITOKAWA HIROSHI, MOON BUM-KI, NAKAZAWA KEISUKE, IMAI KEITARO
Year of Publication 31.03.2005
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Year of Publication 31.03.2005
Patent