Search Results - "ITANO, Mitsushi" :: K.UTB vyhledávací portál | TBU Library Retrieval Portal

High selectivity (SiN/SiO 2) etching using an organic solution containing anhydrous HF

High selectivity (SiN/SiO 2) etching using an organic solution containing anhydrous HF

by Watanabe, Daisuke, Aoki, Hidemitsu, Itano, Mitsushi, Kezuka, Takeshi, Kimura, Chiharu, Sugino, Takashi
Published in Microelectronic engineering (01.11.2009)

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Journal Article

COMPOSITION CONTAINING REFRIGERANT, USE OF THE SAME, REFRIGERATOR COMPRISING THE SAME, AND METHOD FOR OPERATING THE REFRIGERATOR

COMPOSITION CONTAINING REFRIGERANT, USE OF THE SAME, REFRIGERATOR COMPRISING THE SAME, AND METHOD FOR OPERATING THE REFRIGERATOR

by ITANO MITSUSHI, OKUBO SHUN
Year of Publication 22.09.2022

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Patent

COMPOSITION CONTAINING REFRIGERANT, USE OF SAME, REFRIGERATOR COMPRISING SAME, AND METHOD FOR OPERATING SAID REFRIGERATOR

COMPOSITION CONTAINING REFRIGERANT, USE OF SAME, REFRIGERATOR COMPRISING SAME, AND METHOD FOR OPERATING SAID REFRIGERATOR

by ITANO, Mitsushi, OHKUBO, Shun
Year of Publication 15.09.2022

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Patent

Comparative Studies of Perfluorocarbon Alternative Gas Plasmas for Contact Hole Etch

Comparative Studies of Perfluorocarbon Alternative Gas Plasmas for Contact Hole Etch

by Nakamura, Shingo, Itano, Mitsushi, Aoyama, Hirokazu, Shibahara, Kentaro, Yokoyama, Shin, Hirose, Masataka
Published in Japanese Journal of Applied Physics (2003)

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Journal Article

REFRIGERANT-CONTAINING COMPOSITION, USE OF THE SAME, REFRIGERATOR COMPRISING THE SAME, AND METHOD FOR OPERATING REFRIGERATOR

REFRIGERANT-CONTAINING COMPOSITION, USE OF THE SAME, REFRIGERATOR COMPRISING THE SAME, AND METHOD FOR OPERATING REFRIGERATOR

by ITANO MITSUSHI, NAKAGAMI TSUBASA, KOMATSU YUZO
Year of Publication 10.07.2024

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Patent

REFRIGERANT-CONTAINING COMPOSITION, USE OF THE SAME, REFRIGERATOR COMPRISING THE SAME, AND METHOD FOR OPERATING REFRIGERATOR

REFRIGERANT-CONTAINING COMPOSITION, USE OF THE SAME, REFRIGERATOR COMPRISING THE SAME, AND METHOD FOR OPERATING REFRIGERATOR

by ITANO MITSUSHI, NAKAGAMI TSUBASA, KOMATSU YUZO
Year of Publication 10.07.2024

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Patent

REFRIGERANT-CONTAINING COMPOSITION, USE OF SAME, REFRIGERATOR COMPRISING SAME, AND METHOD FOR OPERATING REFRIGERATOR

REFRIGERANT-CONTAINING COMPOSITION, USE OF SAME, REFRIGERATOR COMPRISING SAME, AND METHOD FOR OPERATING REFRIGERATOR

by NAKAUE, Tsubasa, ITANO, Mitsushi, KOMATSU, Yuzo
Year of Publication 04.07.2024

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Patent

REFRIGERANT-CONTAINING COMPOSITION, USE OF SAME, REFRIGERATOR COMPRISING SAME, AND METHOD FOR OPERATING REFRIGERATOR

REFRIGERANT-CONTAINING COMPOSITION, USE OF SAME, REFRIGERATOR COMPRISING SAME, AND METHOD FOR OPERATING REFRIGERATOR

by NAKAUE, Tsubasa, ITANO, Mitsushi, KOMATSU, Yuzo
Year of Publication 04.07.2024

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Patent

COMPOSITION COMPRISING REFRIGERANT, USE OF THE SAME AND REFRIGERATOR HAVING THE SAME AND METHOD OF OPERATING THE REFRIGERATOR

COMPOSITION COMPRISING REFRIGERANT, USE OF THE SAME AND REFRIGERATOR HAVING THE SAME AND METHOD OF OPERATING THE REFRIGERATOR

by GOBO KENJI, ITANO MITSUSHI, NAKAGAMI TSUBASA
Year of Publication 29.09.2023

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Patent

COMPOSITION CONTAINING REFRIGERANT, USE OF SAME, REFRIGERATOR COMPRISING SAME, AND METHOD FOR OPERATING REFRIGERATOR

COMPOSITION CONTAINING REFRIGERANT, USE OF SAME, REFRIGERATOR COMPRISING SAME, AND METHOD FOR OPERATING REFRIGERATOR

by NAKAUE, Tsubasa, ITANO, Mitsushi, GOBOU, Kenji
Year of Publication 21.09.2023

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Patent

METHOD FOR REUSING CLEANING AND/OR ETCHING WASTE LIQUID

METHOD FOR REUSING CLEANING AND/OR ETCHING WASTE LIQUID

by ITANO MITSUSHI
Year of Publication 16.05.2016

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Patent

REFRIGERANT-CONTAINING COMPOSITION, USE OF THE SAME, REFRIGERATOR COMPRISING THE SAME, AND METHOD FOR OPERATING REFRIGERATOR

REFRIGERANT-CONTAINING COMPOSITION, USE OF THE SAME, REFRIGERATOR COMPRISING THE SAME, AND METHOD FOR OPERATING REFRIGERATOR

by YOSHIMURA TAKASHI, USUI TAKASHI, GOTO TOMOYUKI, ITANO MITSUSHI, NAKAGAMI TSUBASA
Year of Publication 10.07.2024

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Patent

REFRIGERANT-CONTAINING COMPOSITION, USE OF SAME, REFRIGERATOR COMPRISING SAME, AND METHOD FOR OPERATING REFRIGERATOR

REFRIGERANT-CONTAINING COMPOSITION, USE OF SAME, REFRIGERATOR COMPRISING SAME, AND METHOD FOR OPERATING REFRIGERATOR

by YOSHIMURA, Takashi, NAKAUE, Tsubasa, ITANO, Mitsushi, USUI, Takashi, GOTO, Tomoyuki
Year of Publication 04.07.2024

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Patent

COMPOSITION CONTAINING REFRIGERANT, USE OF THE SAME, REFRIGERATOR COMPRISING THE SAME, AND METHOD FOR OPERATING THE REFRIGERATOR

COMPOSITION CONTAINING REFRIGERANT, USE OF THE SAME, REFRIGERATOR COMPRISING THE SAME, AND METHOD FOR OPERATING THE REFRIGERATOR

by TOKUNO SATOSHI, ITANO MITSUSHI, OKUBO SHUN
Year of Publication 22.09.2022

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Patent

REFRIGERANT-CONTAINING COMPOSITION, USE THEREOF, REFRIGERATOR HAVING SAID COMPOSITION, AND METHOD FOR OPERATING SAID REFRIGERATOR

REFRIGERANT-CONTAINING COMPOSITION, USE THEREOF, REFRIGERATOR HAVING SAID COMPOSITION, AND METHOD FOR OPERATING SAID REFRIGERATOR

by ITANO, Mitsushi, OHKUBO, Shun, TOKUNO, Satoshi
Year of Publication 15.09.2022

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Patent

REFRIGERANT-CONTAINING COMPOSITION, USE THEREOF, REFRIGERATOR HAVING SAME, AND METHOD FOR OPERATING SAID REFRIGERATOR

REFRIGERANT-CONTAINING COMPOSITION, USE THEREOF, REFRIGERATOR HAVING SAME, AND METHOD FOR OPERATING SAID REFRIGERATOR

by ITANO, Mitsushi, OHKUBO, Shun, KARUBE, Daisuke
Year of Publication 23.06.2022

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Patent

REFRIGERANT-CONTAINING COMPOSITION, USE THEREOF, REFRIGERATOR HAVING THE SAME, AND METHOD FOR OPERATING THE REFRIGERATOR

REFRIGERANT-CONTAINING COMPOSITION, USE THEREOF, REFRIGERATOR HAVING THE SAME, AND METHOD FOR OPERATING THE REFRIGERATOR

by ITANO MITSUSHI, KARUBE DAISUKE, OKUBO SHUN
Year of Publication 24.06.2022

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Patent

CLEANING COMPOSITION

CLEANING COMPOSITION

by ITANO MITSUSHI
Year of Publication 11.06.2015

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Patent

COMPOSITION INCLUDING REFRIGERANT, USE THEREFOR, REFRIGERATOR COMPRISING THE SAME, AND METHOD FOR OPERATING THE REFRIGERATOR

COMPOSITION INCLUDING REFRIGERANT, USE THEREFOR, REFRIGERATOR COMPRISING THE SAME, AND METHOD FOR OPERATING THE REFRIGERATOR

by ITANO MITSUSHI, KARUBE DAISUKE, OKUBO SHUN
Year of Publication 28.10.2021

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Patent

COMPOSITION CONTAINING REFRIGERANT, USE THEREOF, REFRIGERATOR HAVING THE SAME, AND OPERATION METHOD FOR THE REFRIGERATOR

COMPOSITION CONTAINING REFRIGERANT, USE THEREOF, REFRIGERATOR HAVING THE SAME, AND OPERATION METHOD FOR THE REFRIGERATOR

by TAKAHASHI KAZUHIRO, ITANO MITSUSHI, KUROKI HITOMI
Year of Publication 21.10.2021

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Patent

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