VARIABLE TEMPERATURE HARDWARE AND METHOD FOR REDUCTION OF WAFER BACKSIDE DEPOSITION
ISHTAK KARIM, KANG HU, PURUSHOTTAM KUMAR, ADRIEN LAVOIE, RAMESH CHANDRASEKHARAN, QIAN JUN
Year of Publication 26.07.2023
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Year of Publication 26.07.2023
Patent
WAFER EDGE CONTACT HARDWARE, AND METHOD FOR ELIMINATING DEPOSITION AT WAFER BACKSIDE EDGE AND NOTCH
ISHTAK KARIM, RICHARD PHILLIPS, PATRICK BREILING, KIM SUNG-JE, PURUSHOTTAM KUMAR, CHLOE BALDASSERONI, ADRIEN LAVOIE, RAMESH CHANDRASEKHARAN, MIKE ROBERTS
Year of Publication 19.07.2023
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Year of Publication 19.07.2023
Patent
VARIABLE TEMPERATURE HARDWARE AND METHOD FOR REDUCTION OF WAFER BACKSIDE DEPOSITION
ISHTAK KARIM, KANG HU, PURUSHOTTAM KUMAR, ADRIEN LAVOIE, RAMESH CHANDRASEKHARAN, QIAN JUN
Year of Publication 09.09.2021
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Year of Publication 09.09.2021
Patent
VARIABLE TEMPERATURE HARDWARE AND METHOD FOR REDUCTION OF WAFER BACKSIDE DEPOSITION
ISHTAK KARIM, KANG HU, PURUSHOTTAM KUMAR, ADRIEN LAVOIE, RAMESH CHANDRASEKHARAN, QIAN JUN
Year of Publication 09.09.2021
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Year of Publication 09.09.2021
Patent
HIGH DRY ETCHING VELOCITY MATERIAL FOR SEMICONDUCTOR PATTERNING APPLICATION
ISHTAK KARIM, PURUSHOTTAM KUMAR, SHANKAR SWAMINATHAN, ADRIEN LAVOIE, ARPAN MAHOROWALA
Year of Publication 10.05.2018
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Year of Publication 10.05.2018
Patent
VARIABLE CYCLE AND TIME RF ACTIVATION METHOD FOR THICKNESS MATCHING IN MULTI-STATION DEPOSITION SYSTEM
ISHTAK KARIM, PURUSHOTTAM KUMAR, JASWINDER GULIANI, ADRIEN LAVOIE, CHO KIYONG, QIAN JUN
Year of Publication 02.11.2017
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Year of Publication 02.11.2017
Patent
VARIABLE TEMPERATURE HARDWARE AND METHODS FOR REDUCTION OF WAFER BACKSIDE DEPOSITION
ISHTAK KARIM, KANG HU, PURUSHOTTAM KUMAR, ADRIEN LAVOIE, RAMESH CHANDRASEKHARAN, QIAN JUN
Year of Publication 03.08.2017
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Year of Publication 03.08.2017
Patent
DYNAMIC PRECURSOR DOSING FOR ATOMIC LAYER DEPOSITION
ISHTAK KARIM, KANG HU, PURUSHOTTAM KUMAR, ADRIEN LAVOIE, QIAN JUN, OU FUNG SUONG
Year of Publication 18.05.2017
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Year of Publication 18.05.2017
Patent
PLANAR SUBSTRATE EDGE CONTACT WITH OPEN VOLUME EQUALIZATION PATHWAYS AND SIDE CONTAINMENT
PATRICK BREILING, KARL LEESER, ADRIEN LAVOIE, SHANKAR SWAMINATHAN, RAMESH CHANDRASEKHARAN, EDMUND MINSHALL, KIM SUNG JE, ISHTAK KARIM, SAKIYAMA YUKINORI, CHLOE BALDASSERONI, ANDREW DUVALL, PAUL KONKOLA, FRANK PASQUALE
Year of Publication 17.05.2018
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Year of Publication 17.05.2018
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LINE BENDING CONTROL FOR MEMORY APPLICATIONS
BUTAIL, Gorun, VAN CLEEMPUT, Patrick, THOMBARE, Shruti, KARIM, Ishtak
Year of Publication 23.05.2024
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Year of Publication 23.05.2024
Patent
SELECTIVE MOLYBDENUM FILL
KARIM, Ishtak, VARADARAJAN, Seshasayee, ASHTIANI, Kaihan Abidi, LEE, Sang-Hyeob
Year of Publication 02.05.2024
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Year of Publication 02.05.2024
Patent
Line bending control for memory applications
Van Cleemput, Patrick, Butail, Gorun, Thombare, Shruti, Karim, Ishtak
Year of Publication 02.01.2024
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Year of Publication 02.01.2024
Patent