Design Method for GRS Integral Bridge with the Use of PCT Girder
TODOROKI, Shuntaro, OKAMOTO, Masaru, NISIOKA, Hidetoshi, TAMAI, Shinichi, YONEZAWA, Toyoji, ISHII, Hidekazu
Published in Quarterly Report of RTRI (01.05.2022)
Published in Quarterly Report of RTRI (01.05.2022)
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Journal Article
A High Sensitivity and Compact Real Time Gas Concentration Sensor for Semiconductor and Electronic Device Manufacturing Process
Ishii, Hidekazu, Nagase, Masaaki, Ikeda, Nobukazu, Shiba, Yoshinobu, Shirai, Yasuyuki, Kuroda, Rihito, Sugawa, Shigetoshi
Published in ECS transactions (19.06.2018)
Published in ECS transactions (19.06.2018)
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Journal Article
Dependence of the Decomposition of Trimethylaluminum on Oxygen Concentration
Yamashita, Satoru, Watanuki, Kohei, Ishii, Hidekazu, Shiba, Yoshinobu, Kitano, Masafumi, Shirai, Yasuyuki, Sugawa, Shigetoshi, Ohmi, Tadahiro
Published in Journal of the Electrochemical Society (2011)
Published in Journal of the Electrochemical Society (2011)
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Journal Article
Low Work Function LaB6 Thin Films Prepared by Nitrogen Doped LaB6 Target Sputtering
Ishii, Hidekazu, Takahashi, Kentaro, Goto, Tetsuya, Sugawa, Shigetoshi, Ohmi, Tadahiro
Published in ECS transactions (20.07.2015)
Published in ECS transactions (20.07.2015)
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Journal Article
Measurements of helium 23S metastable atom density in low-pressure glow discharge plasmas by self-absorption spectroscopy of HeI 23S-23P transition
Shikama, Taiichi, Ogane, Shuhei, Ishii, Hidekazu, Iida, Yohei, Hasuo, Masahiro
Published in Japanese Journal of Applied Physics (17.07.2014)
Published in Japanese Journal of Applied Physics (17.07.2014)
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Journal Article
A high sensitivity compact gas concentration sensor using UV light and charge amplifier circuit
Ishii, Hidekazu, Nagase, Masaaki, Ikeda, Nobukazu, Shiba, Yoshinobu, Shirai, Yasuyuki, Kuroda, Rihito, Sugawa, Shigetoshi
Published in 2016 IEEE SENSORS (01.10.2016)
Published in 2016 IEEE SENSORS (01.10.2016)
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Conference Proceeding
Oxidizing Species Dependence of the Interface Reaction during Atomic-Layer-Deposition Process and Post-Deposition-Anneal
Suwa, Tomoyuki, Teramoto, Akinobu, Koda, Yasumasa, Saito, Masaya, Sugita, Hisaya, Hayashi, Marie, Tsuchimoto, Junichi, Ishii, Hidekazu, Shiba, Yoshinobu, Shirai, Yasuyuki, Sugawa, Shigetoshi
Published in ECS transactions (19.08.2016)
Published in ECS transactions (19.08.2016)
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Journal Article
Effect of Process Temperature of Al2O3 Atomic Layer Deposition Using Accurate Process Gasses Supply System
Sugita, Hisaya, Koda, Yasumasa, Suwa, Tomoyuki, Kuroda, Rihito, Goto, Tetsuya, Ishii, Hidekazu, Yamashita, Satoru, Teramoto, Akinobu, Sugawa, Shigetoshi, Ohmi, Tadahiro
Published in ECS transactions (31.03.2015)
Published in ECS transactions (31.03.2015)
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Journal Article