High Quality Factor Graphene Resonator Fabrication Using Resist Shrinkage-Induced Strain
Oshidari, Yuta, Hatakeyama, Taiki, Kometani, Reo, Warisawa, Shin'ichi, Ishihara, Sunao
Published in Applied physics express (01.11.2012)
Published in Applied physics express (01.11.2012)
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Journal Article
Special Issue on Nanosensing and Microsensing
Kometani, Reo, Ishihara, Sunao
Published in International journal of automation technology (05.01.2018)
Published in International journal of automation technology (05.01.2018)
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Journal Article
Nanoelectromechanical device fabrications by 3-D nanotechnology using focused-ion beams
Kometani, Reo, Ishihara, Sunao
Published in Science and technology of advanced materials (01.06.2009)
Published in Science and technology of advanced materials (01.06.2009)
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Journal Article
The 3D nanostructure growth evaluations by the real-time current monitoring on focused-ion-beam chemical vapor deposition
Kometani, Reo, Warisawa, Shin’ichi, Ishihara, Sunao
Published in Microelectronic engineering (01.05.2010)
Published in Microelectronic engineering (01.05.2010)
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Journal Article
Conference Proceeding
Non-Core--Shell Nanostructure Deposition on Focused-Ion-Beam Chemical Vapor Deposition
Kometani, Reo, Warisawa, Shin'ichi, Ishihara, Sunao
Published in Japanese Journal of Applied Physics (01.06.2010)
Published in Japanese Journal of Applied Physics (01.06.2010)
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Journal Article
Evaluation Method of the Quality Factor of Micromechanical Resonators Using Electron Beams
Ashiba, Hiroki, Warisawa, Shin'ichi, Ishihara, Sunao
Published in Japanese Journal of Applied Physics (01.06.2009)
Published in Japanese Journal of Applied Physics (01.06.2009)
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Journal Article
Growth characteristics evaluations on the 3D nanostructure fabrication by the high accuracy control of focused-ion-beam
Kometani, Reo, Hoshino, Takayuki, Warisawa, Shin’ichi, Ishihara, Sunao
Published in Microelectronic engineering (01.04.2009)
Published in Microelectronic engineering (01.04.2009)
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Journal Article
Conference Proceeding
Focus on Novel Nanoelectromechanical 3D Structures: Fabrication and Properties
Yamada, Shooji, Yamaguchi, Hiroshi, Ishihara, Sunao
Published in Science and technology of advanced materials (01.06.2009)
Published in Science and technology of advanced materials (01.06.2009)
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Journal Article
A Nanomechanical Resonator from HSQ Fabricated by FIB/EB Dual Beam Lithography
Warisawa, Shin’ichi, Kuroda, Kohei, Chen, Si, Kometani, Reo, Ishihara, Sunao
Published in Journal of Photopolymer Science and Technology (01.01.2012)
Published in Journal of Photopolymer Science and Technology (01.01.2012)
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Journal Article
Evaluation of Thermal–Mechanical Vibration Amplitude and Mechanical Properties of Carbon Nanopillars Using Scanning Electron Microscopy
Nonaka, Keiichiro, Tamaru, Kojiro, Nagase, Masao, Yamaguchi, Hiroshi, Warisawa, Shin'ichi, Ishihara, Sunao
Published in Japanese Journal of Applied Physics (01.06.2009)
Published in Japanese Journal of Applied Physics (01.06.2009)
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Journal Article
Eduction Position Control of Incorporated Gallium in Diamond-Like Carbon Deposited by Focused-Ion-Beam Chemical Vapor Deposition
Kometani, Reo, Ishihara, Sunao, Kanda, Kazuhiro, Haruyama, Yuichi, Kaito, Takashi, Matsui, Shinji
Published in Japanese Journal of Applied Physics (01.06.2008)
Published in Japanese Journal of Applied Physics (01.06.2008)
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Journal Article