MICROMECHANICAL DEVICE, METHOD FOR ITS MANUFACTURE AND SYSTEM FOR MANIPULATION OF MICRO-AND NANOOBJECTS
ZAKHAROV DMITRIJ IGOREVICH, TARASOV IL'JA SERGEEVICH, SITNIKOV NIKOLAJ NIKOLAEVICH, SHELJAKOV ALEKSANDR VASIL'EVICH, IRZHAK ARTEMIJ VADIMOVICH, PIKHTIN NIKITA ALEKSANDROVICH, SHAVROV VLADIMIR GRIGOR'EVICH, LEGA PETR VIKTOROVICH, AFONINA VERONIKA SEMENOVNA, KOLEDOV VIKTOR VIKTOROVICH, MASHIROV ALEKSEJ VIKTOROVICH
Year of Publication 10.08.2012
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Year of Publication 10.08.2012
Patent