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Published in Journal of the Electrochemical Society (2006)
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The Influence of Particle Morphology on the Si(001) Surface in EEM (Elastic Emission Machining)
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Published in Journal of the Japan Society for Precision Engineering, Contributed Papers (2005)
Published in Journal of the Japan Society for Precision Engineering, Contributed Papers (2005)
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Journal Article
Atomic-scale evaluation of si(111) surfaces finished by the planarization process utilizing SiO2 particles mixed with water
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Published in Journal of the Electrochemical Society (01.01.2006)
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Published in European journal of pharmacology (17.11.2000)
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Flattening of Si (001) Surface by EEM (Elastic Emission Machining): Atomic Structure Identification of Processed Surface
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Published in Journal of the Japan Society for Precision Engineering, Contributed Papers (05.04.2004)
Published in Journal of the Japan Society for Precision Engineering, Contributed Papers (05.04.2004)
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Flattening Si (001) surface by EEM (Elastic Emission Machining): Development of Ultraclean EEM system for ultraflat semiconductor surface preparation
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Published in Journal of the Japan Society for Precision Engineering, Contributed Papers (05.03.2004)
Published in Journal of the Japan Society for Precision Engineering, Contributed Papers (05.03.2004)
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HEAT TRANSFER MEDIUM AND HEAT TRANSFER SYSTEM
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Preparation of ultrasmooth and defect-free 4H-SiC(0001) surfaces by elastic emission machining: Special issue on SiC and the group III nitride semiconductors
KUBOTA, Akihisa, MIMURA, Hidekazu, INAGAKI, Kouji, ARIMA, Kenta, MORI, Yuzo, YAMAUCHI, Kazuto
Published in Journal of electronic materials (2005)
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Published in Journal of electronic materials (2005)
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Self-consistent van der Waals density functional study of benzene adsorption on Si(100)
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Published in arXiv.org (08.05.2016)
Published in arXiv.org (08.05.2016)
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