Search Results - "INA HIDEKI" :: K.UTB vyhledávací portál | TBU Library Retrieval Portal

Aberration evaluation of alignment optics in lithographic tools by use of a step-height structure highly sensitive to the asymmetry of an optical image

Aberration evaluation of alignment optics in lithographic tools by use of a step-height structure highly sensitive to the asymmetry of an optical image

by Ina, Hideki, Takeda, Mitsuo
Published in Applied optics (2004) (10.06.2007)

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Journal Article

Signal Processing Using Karhunen--Loève Expansion for Wafer Focus Measurement in Lithography

Signal Processing Using Karhunen--Loève Expansion for Wafer Focus Measurement in Lithography

by Oishi, Satoru, Ina, Hideki, Miyashita, Tomoyuki
Published in Japanese Journal of Applied Physics (01.06.2011)

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Journal Article

SHAPE MEASUREMENT METHOD, SHAPE MEASUREMENT DEVICE AND MANUFACTURING METHOD OF PARTICLES

SHAPE MEASUREMENT METHOD, SHAPE MEASUREMENT DEVICE AND MANUFACTURING METHOD OF PARTICLES

by INA HIDEKI, NAKAMURA TAKAHIRO
Year of Publication 14.06.2022

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Patent

Focus and Dose Measurement Method in Volume Production

Focus and Dose Measurement Method in Volume Production

by Ina, Hideki, Oishi, Satoru, Sentoku, Koichi
Published in Japanese Journal of Applied Physics (01.07.2005)

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Journal Article

OPTICAL DESIGN METHOD AND DIFFRACTION OPTICAL ELEMENT

OPTICAL DESIGN METHOD AND DIFFRACTION OPTICAL ELEMENT

by MARUYAMA JUN, INA HIDEKI, OGUCHI YASUNARI
Year of Publication 26.06.2024

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Patent

FINE PARTICLE PRODUCTION METHOD AND FINE PARTICLE EVALUATION METHOD

FINE PARTICLE PRODUCTION METHOD AND FINE PARTICLE EVALUATION METHOD

by GOTO HIROSHI, INA HIDEKI, NAKAMURA TAKAHIRO
Year of Publication 01.12.2023

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Patent

METHOD FOR PRODUCING FINE PARTICLES

METHOD FOR PRODUCING FINE PARTICLES

by GOTO HIROSHI, INA HIDEKI, NAKAMURA TAKAHIRO
Year of Publication 01.12.2023

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Patent

PHOTOELECTRIC CONVERSION DEVICE AND EQUIPMENT

PHOTOELECTRIC CONVERSION DEVICE AND EQUIPMENT

by TORII KEITA, INA HIDEKI
Year of Publication 07.05.2020

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Patent

OPTICAL DESIGN METHOD

OPTICAL DESIGN METHOD

by TOMINAGA SHUICHI, MARUYAMA JUN, INA HIDEKI
Year of Publication 25.07.2023

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Patent

Alignment Offset Analyzer against Wafer-Induced Shift

Alignment Offset Analyzer against Wafer-Induced Shift

by Ina, Hideki, Matsumoto, Takahiro, Sentoku, Koichi
Published in Japanese Journal of Applied Physics (01.06.2004)

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Journal Article

MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE, DETERMINATION METHOD OF EXPOSURE CONDITION AND PROGRAM

MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE, DETERMINATION METHOD OF EXPOSURE CONDITION AND PROGRAM

by YAMAZAKI TOMONOBU, INA HIDEKI
Year of Publication 01.02.2018

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Patent

METHOD FOR PRODUCING NANOPARTICLES

METHOD FOR PRODUCING NANOPARTICLES

by GOTO Hiroshi, NAKAMURA Takahiro, YASUDA Takuo, INA Hideki
Year of Publication 01.12.2022

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Patent

ETCHING METHOD

ETCHING METHOD

by KITAMURA SHINGO, INA HIDEKI
Year of Publication 31.08.2017

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Patent

EXPOSURE METHOD AND ARTICLE MANUFACTURING METHOD

EXPOSURE METHOD AND ARTICLE MANUFACTURING METHOD

by INA HIDEKI, TOYODA TAKEHIRO
Year of Publication 25.05.2017

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Patent

PATTERN FORMATION METHOD AND METHOD FOR PRODUCING ARTICLE

PATTERN FORMATION METHOD AND METHOD FOR PRODUCING ARTICLE

by INA HIDEKI, TOYODA TAKEHIRO
Year of Publication 27.04.2017

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Patent

LITHOGRAPHIC APPARATUS, LITHOGRAPHY METHOD, AND ARTICLE MANUFACTURING METHOD

LITHOGRAPHIC APPARATUS, LITHOGRAPHY METHOD, AND ARTICLE MANUFACTURING METHOD

by YAMAGUCHI WATARU, INA HIDEKI
Year of Publication 23.02.2017

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Patent

DRAWING APPARATUS AND MANUFACTURING METHOD OF ARTICLE

DRAWING APPARATUS AND MANUFACTURING METHOD OF ARTICLE

by NISHIDA TOSHIHIKO, INA HIDEKI
Year of Publication 22.12.2016

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Patent

Alignment Mark Optimization to Reduce Tool- and Wafer-Induced Shift for XRA-1000

Alignment Mark Optimization to Reduce Tool- and Wafer-Induced Shift for XRA-1000

by Ina, Hideki, Sentoku, Koichi, Matsumoto, Takahiro, Sumitani, Hiroaki, Suita, Muneyoshi
Published in Japanese Journal of Applied Physics (01.12.1999)

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Journal Article

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

by MIYANO KOUKI, INA HIDEKI, TOYODA TAKEHIRO, ASANO KOSUKE, KOBAYASHI HIROAKI
Year of Publication 07.10.2021

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Patent

METHOD FOR FABRICATING SEMICONDUCTOR DEVICE

METHOD FOR FABRICATING SEMICONDUCTOR DEVICE

by INA HIDEKI, TOYODA TAKEHIRO, ASANO KOSUKE, MIYANO KOKI, KOBAYASHI HIROAKI
Year of Publication 07.10.2021

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Patent

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