Search Results - "INA HIDEKI" :: K.UTB vyhledávací portál

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Exposure apparatus

by TAKAHASHI GAKU, MIWA YOSHINORI, SENTOKU KOICHI, INA HIDEKI
Year of Publication 08.09.2009

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Exposure apparatus

by Ina, Hideki, Sentoku, Koichi, Takahashi, Gaku, Miwa, Yoshinori
Year of Publication 08.09.2009

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Illumination method and system having a first optical element at a position optically conjugate with an object and a second optical element closer to the object and on a pupil plane of the system

by INA; HIDEKI, KANDA; TSUNEO
Year of Publication 15.09.1998

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Mold, pattern forming method, and pattern forming apparatus

by MAJIMA, MASAO, TERASAKI, ATSUNORI, SEKI, JUNICHI, SUEHIRA, NOBUHITO, INA, HIDEKI
Year of Publication 19.08.2009

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Position detecting device

by INA; HIDEKI, MITOME; NORIYUKI
Year of Publication 04.08.1998

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Measuring apparatus, imprint system, measuring method, and device manufacturing method

by SATO, KAZUHIRO, MINODA, KEN, MIYAKAWA, TAKAHIRO, INA, HIDEKI
Year of Publication 01.01.2016

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Surface shape measuring apparatus, exposure apparatus, and device manufacturing method

by YAMAGUCHI, WATARU, MATSUMOTO, TAKAHIRO, INA, HIDEKI
Year of Publication 21.11.2013

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PROCESS FOR PRODUCING A CHIP USING A MOLD

by SUEHIRA NOBUHITO, TERASAKI ATSUNORI, SEKI JUNICHI, INA HIDEKI, OKUSHIMA SHINGO
Year of Publication 18.06.2009

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MOLD, IMPRINT METHOD, AND PROCESS FOR PRODUCING A CHIP

by SUEHIRA NOBUHITO, TERASAKI ATSUNORI, SEKI JUNICHI, INA HIDEKI, OKUSHIMA SHINGO
Year of Publication 18.06.2009

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Lithography apparatus and method, and method of manufacturing an article

by SUGIYAMA, YUSUKE, OISHI, SATORU, INA, HIDEKI, OGAWA, SHIGEKI
Year of Publication 16.11.2015

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Imprint apparatus and imprint method including dual movable image pick-up device

by Suehira, Nobuhito, Seki, Junichi, Ina, Hideki, Sentoku, Koichi
Year of Publication 12.05.2009

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Imprint apparatus and imprint method including dual movable image pick-up device

by SUEHIRA NOBUHITO, SENTOKU KOICHI, SEKI JUNICHI, INA HIDEKI
Year of Publication 12.05.2009

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ALIGNMENT METHOD, IMPRINT METHOD, ALIGNMENT APPARATUS, AND POSITION MEASUREMENT METHOD

by SUEHIRA NOBUHITO, SENTOKU KOICHI, SEKI JUNICHI, INA HIDEKI
Year of Publication 30.04.2009

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GAP MEASURING METHOD, IMPRINT METHOD, AND IMPRINT APPARATUS

by SUEHIRA NOBUHITO, SEKI JUNICHI, INA HIDEKI, FURUKAWA YUKIO
Year of Publication 23.04.2009

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Alignment method and exposure apparatus using the same

by SATOH, TAKASHI, YOSHII, MINORU, HASEGAWA, MASANOBU, INA, HIDEKI
Year of Publication 22.04.2009

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Mold, imprint method, and process for producing chip

by Terasaki, Atsunori, Seki, Junichi, Suehira, Nobuhito, Ina, Hideki, Okushima, Shingo
Year of Publication 31.03.2009

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Mold, imprint method, and process for producing chip

by SUEHIRA NOBUHITO, TERASAKI ATSUNORI, SEKI JUNICHI, INA HIDEKI, OKUSHIMA SHINGO
Year of Publication 31.03.2009

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GAP MEASURING METHOD, IMPRINT METHOD, AND IMPRINT APPARATUS

by SEKI JUNICHI, INA HIDEKI, SUEHIRA NOBUHIKO, FURUKAWA YUKIO
Year of Publication 18.03.2009

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GAP MEASURING METHOD, IMPRINT METHOD, AND IMPRINT APPARATUS

by SUEHIRA, NOBUHIKO, FURUKAWA, YUKIO, SEKI, JUNICHI, INA, HIDEKI
Year of Publication 04.03.2009

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Information processing apparatus,measurement apparatus,computer readable storage medium,and method for processing an interference signal

by MATSUMOTO, TAKAHIRO, INA, HIDEKI, MIYASHITA, TOMOYUKI
Year of Publication 01.08.2013

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