Planar diffuser/nozzle micropumps with extremely thin polyimide diaphragms
Liu, Yingwei, Komatsuzaki, Hiroki, Imai, Satomitsu, Nishioka, Yasushiro
Published in Sensors and actuators. A. Physical. (01.10.2011)
Published in Sensors and actuators. A. Physical. (01.10.2011)
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Journal Article
Diffuser Micropump Structured with Extremely Flexible Diaphragm of 2-μm-thick Polyimide Film
Liu, Yingwei, Komatsuzaki, Hiroki, Duan, Zongfan, Imai, Satomitsu, Nishioka, Yasuhiro
Published in Jpn J Appl Phys (01.04.2011)
Published in Jpn J Appl Phys (01.04.2011)
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Journal Article