Comparative study on atomic layer deposition of HfO 2 via substitution of ligand structure with cyclopentadiene
Park, Sungmin, Park, Bo-Eun, Yoon, Hwi, Lee, Sanghun, Nam, Taewook, Cheon, Taehoon, Kim, Soo-Hyun, Cheon, Hwansung, Im, Sangkyun, Seong, Taegeun, Kim, Hyungjun
Published in Journal of materials chemistry. C, Materials for optical and electronic devices (30.01.2020)
Published in Journal of materials chemistry. C, Materials for optical and electronic devices (30.01.2020)
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Journal Article
Comparative study on atomic layer deposition of HfO2via substitution of ligand structure with cyclopentadiene
Park, Sungmin, Bo-Eun Park, Yoon, Hwi, Lee, Sanghun, Nam, Taewook, Cheon, Taehoon, Soo-Hyun, Kim, Cheon, Hwansung, Im, Sangkyun, Taegeun Seong, Kim, Hyungjun
Published in Journal of materials chemistry. C, Materials for optical and electronic devices (01.01.2020)
Published in Journal of materials chemistry. C, Materials for optical and electronic devices (01.01.2020)
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Journal Article
Display module and manufacturing method thereof
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Year of Publication 14.11.2023
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Year of Publication 14.11.2023
Patent
DISPLAY MODULE AND MANUFACTURING METHOD THEREOF
Im, Sangkyun, Jang, Hyuntae, Roh, Sanghoon, Son, Jihyeon, Lee, Joowhan, Choi, Won
Year of Publication 13.01.2022
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Year of Publication 13.01.2022
Patent
Composition for depositing thin film, manufacturing method for thin film using the composition, thin film manufactured from the composition, and semiconductor device including the thin film
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Year of Publication 25.10.2022
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Year of Publication 25.10.2022
Patent