METHOD FOR PRODUCING A SILICON SUBSTRATE HAVING MODIFIED SURFACE PROPERTIES
LAERMER, FRANZ, ARMBRUSTER, SIMON, SCHELLING, CHRISTOPH, LAMMEL, GERHARD, KRONMUELLER, SILVIA, FEYH, ANDO, BENZEL, HUBERT, FARBER, PAUL, ILLING, MATTHIAS, REICHENBACH, RALF
Year of Publication 26.08.2015
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Year of Publication 26.08.2015
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Acceleration sensor, has projection that limits deflection of seismic mass under effect of acceleration force in direction and is formed at seismic mass and/or crystal substrate, where epitaxy layer is applied on front side of substrate
ARMBRUSTER, SIMON, SCHELLING, CHRISTOPH, LAMMEL, GERHARD, BENZEL, HUBERT, ILLING, MATTHIAS, BRASAS, JOERG
Year of Publication 16.05.2007
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Year of Publication 16.05.2007
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Method for producing chips
BENZEL HUBERT, PINTER STEFAN, KRAMER TORSTEN, HAAG FRIEDER, ARMBRUSTER SIMON, ILLING MATTHIAS, BOEHRINGER MATTHIAS
Year of Publication 20.11.2013
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Year of Publication 20.11.2013
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Micromechanical sensor element
BENZEL HUBERT, SCHAEFER FRANK, BRASAS JOERG, FINKBEINER STEFAN, SCHELLING CHRISTOPH, LAMMEL GERHARD, ARMBRUSTER SIMON, ILLING MATTHIAS
Year of Publication 23.03.2006
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Year of Publication 23.03.2006
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Sensor element with trenched cavity
BENZEL HUBERT, SCHAEFER FRANK, BRASAS JOERG, FINKBEINER STEFAN, SCHELLING CHRISTOPH, LAMMEL GERHARD, ARMBRUSTER SIMON, ILLING MATTHIAS
Year of Publication 16.03.2006
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Year of Publication 16.03.2006
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ELEMENTO SENSORE MICROMECCANICO
BENZEL HUBERT, BRASAS JOERG, SCHAEFER FRANK, FINKBEINER STEFAN, SCHELLING CHRISTOPH, LAMMEL GERHARD, ARMBRUSTER SIMON, ILLING MATTHIAS
Year of Publication 09.03.2006
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Year of Publication 09.03.2006
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Micromechanical membrane sensor comprising a double membrane
WEISS STEFAN, SCHELLING CHRISTOPH, WEBER HERIBERT, ILLING MATTHIAS, STAHL HEIKO
Year of Publication 09.03.2011
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Year of Publication 09.03.2011
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Method and device for correcting a signal of a sensor
RAU CHRISTOF, FISCHER WOLFGANG, SCHULZ UDO, BARTH HEINRICH, BAHLO JAN, PFAEFFLE ANNDREAS, STROHMAIER RAINER, BERGER JOACHIM, HATHOUT JEAN-PIERRE, KLATT ROLAND, HANDLER TORSTEN, DRESSLER WOLFGANG, DANNER REINHOLD, BLEILE THOMAS, PAUER THOMAS, FLIK GOTTFRIED, ILLING MATTHIAS, SCHEIDT MICHAEL, SCHUELER MATTHIAS
Year of Publication 03.09.2009
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Year of Publication 03.09.2009
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SENSOR ELEMENT WITH TRENCHED CAVITY
BENZEL HUBERT, SCHAEFER FRANK, BRASAS JOERG, SCHELLING CHRISTOPH, FINKBEINER STEFAN DR, LAMMEL GERHARD, ARMBRUSTER SIMON, ILLING MATTHIAS
Year of Publication 23.03.2006
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Year of Publication 23.03.2006
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MICRO-MACHINING TYPE SENSOR ELEMENT
BENZEL HUBERT, SCHAEFER FRANK, BRASAS JOERG, SCHELLING CHRISTOPH, FINKBEINER STEFAN DR, LAMMEL GERHARD, ARMBRUSTER SIMON, ILLING MATTHIAS
Year of Publication 23.03.2006
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Year of Publication 23.03.2006
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ELEMENT DE CAPTEUR COMPORTANT UNE CAVITE AVEC DES TRANCHEES
BENZEL HUBERT, SCHAEFER FRANK, BRASAS JOERG, FINKBEINER STEFAN, SCHELLING CHRISTOPH, LAMMEL GERHARD, ARMBRUSTER SIMON, ILLING MATTHIAS
Year of Publication 09.03.2012
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Year of Publication 09.03.2012
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MICROMECHANICAL COMPONENT COMPRISING A MEMBRANE LATTICE
ARMBRUSTER, SIMON, BENZEL, HUBERT, KRAMER, TORSTEN, ILLING, MATTHIAS, BRASAS, JOERG
Year of Publication 16.07.2009
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Year of Publication 16.07.2009
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Mikromechanisches Bauelement mit einem Membrangitter
ARMBRUSTER, SIMON, BENZEL, HUBERT, KRAMER, TORSTEN, BRASAS, JOERG, ILLING, MATTHIAS
Year of Publication 14.05.2009
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Year of Publication 14.05.2009
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MICROMECHANICAL COMPONENT COMPRISING A MEMBRANE LATTICE
ARMBRUSTER, SIMON, BENZEL, HUBERT, KRAMER, TORSTEN, ILLING, MATTHIAS, BRASAS, JOERG
Year of Publication 14.05.2009
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Year of Publication 14.05.2009
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METHOD AND DEVICE FOR CORRECTING THE SIGNAL OF A SENSOR
RAU CHRISTOF, HATHOUT JEAN PIERRE, FISCHER WOLFGANG, SCHULZ UDO, BARTH HEINRICH, BAHLO JAN, STROHMAIER RAINER, BERGER JOACHIM, KLATT ROLAND, HANDLER TORSTEN, DRESSLER WOLFGANG, DANNER REINHOLD, BLEILE THOMAS, PFAEFFLE ANDREAS, PAUER THOMAS, FLIK GOTTFRIED, ILLING MATTHIAS, SCHEIDT MICHAEL, SCHUELER MATTHIAS
Year of Publication 19.02.2008
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Year of Publication 19.02.2008
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