Spectrum imaging measurements with semi-parallel detection using an AES apparatus
Taguchi, Noboru, Uchida, Tatsuya, Ikita, Konomi, Tanaka, Akihiro, Ikeo, Nobuyuki, Yokouchi, Kazushiro, Tsutsumi, Kenichi
Published in Ultramicroscopy (01.03.2022)
Published in Ultramicroscopy (01.03.2022)
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Journal Article
CHARGED PARTICLE BEAM DEVICE
TSUTSUMI KENICHI, UCHIDA TATSUYA, IKEO NOBUYUKI, YOKOUCHI KAZUKI, IKITA KONOMI
Year of Publication 05.10.2023
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Year of Publication 05.10.2023
Patent
New Spectrum Imaging Method for Solid Surfaces with Secondary Electrons acquired over Wide Energy Range (>1000 eV)
Uchida, Tatsuya, Ikita, Konomi, Tanaka, Akihiro, Tsutsumi, Kenichi, Ikeo, Nobuyuki, Yokouchi, Kazushiro, Taguchi, Noboru, Tanaka, Shingo
Published in 2023 IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA) (24.07.2023)
Published in 2023 IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA) (24.07.2023)
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Conference Proceeding
Charged Particle Beam Apparatus
Ikita, Konomi, Uchida, Tatsuya, Tsutsumi, Kenichi, Ikeo, Nobuyuki, Yokouchi, Kazushiro
Year of Publication 28.09.2023
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Year of Publication 28.09.2023
Patent
CHARGED PARTICLE BEAM APPARATUS
YOKOUCHI, Kazushiro, TSUTSUMI, Kenichi, UCHIDA, Tatsuya, IKITA, Konomi, IKEO, Nobuyuki
Year of Publication 27.09.2023
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Year of Publication 27.09.2023
Patent