A Sub-1 Hz Resonance Frequency Resonator Enabled by Multi-Step Tuning for Micro-Seismometer
Wu, Jun, Maekoba, Hideyuki, Parent, Arnaud, Ikehashi, Tamio
Published in Micromachines (Basel) (30.12.2021)
Published in Micromachines (Basel) (30.12.2021)
Get full text
Journal Article
High sensitivity MEMS capacitive hydrogen sensor with inverted T-shaped electrode and ring-shaped palladium alloy for fast response and low power consumption
Yamazaki, Hiroaki, Hayashi, Yumi, Masunishi, Kei, Ono, Daiki, Ikehashi, Tamio
Published in Journal of micromechanics and microengineering (01.09.2018)
Published in Journal of micromechanics and microengineering (01.09.2018)
Get full text
Journal Article
A MEMS rate integrating gyroscope based on catch-and-release mechanism for low-noise continuous angle measurement
Gando, Ryunosuke, Maeda, Shunta, Masunishi, Kei, Tomizawa, Yasushi, Ogawa, Etsuji, Hatakeyama, Yohei, Itakura, Tetsuro, Ikehashi, Tamio
Published in 2018 IEEE Micro Electro Mechanical Systems (MEMS) (01.01.2018)
Published in 2018 IEEE Micro Electro Mechanical Systems (MEMS) (01.01.2018)
Get full text
Conference Proceeding
Effects of poisoning gases on and restoration of PdCuSi metallic glass in a capacitive MEMS hydrogen sensor
Hayashi, Yumi, Yamazaki, Hiroaki, Masunishi, Kei, Ikehashi, Tamio, Nakamura, Naofumi, Kojima, Akihiro
Published in International journal of hydrogen energy (01.01.2020)
Published in International journal of hydrogen energy (01.01.2020)
Get full text
Journal Article
CMOS-embedded high-power handling RF-MEMS tunable capacitor using quadruple series capacitor and slit with dielectric bridges structure
Yamazaki, Hiroaki, Kurui, Yoshihiko, Saito, Tomohiro, Ogawa, Etsuji, Obara, Kei, Gando, Ryunosuke, Ono, Daiki, Ikehashi, Tamio
Published in Japanese Journal of Applied Physics (01.10.2018)
Published in Japanese Journal of Applied Physics (01.10.2018)
Get full text
Journal Article