Various applications of resonant pressure sensor chip based on 3-D micromachining
Harada, Kinji, Ikeda, Kyoichi, Kuwayama, Hideki, Murayama, Hidekazu
Published in Sensors and actuators. A. Physical. (30.03.1999)
Published in Sensors and actuators. A. Physical. (30.03.1999)
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Journal Article
SENSOR FOR ELEVATOR OPERATION PANEL
TAKADA HIDEKI, IKEDA KYOICHI, FUMIYA MASAHIRO, ARASE KO, HINOHARA TAKAMASA
Year of Publication 10.11.2022
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Year of Publication 10.11.2022
Patent