A CNN-based Transfer Learning Method for Defect Classification in Semiconductor Manufacturing
Imoto, Kazunori, Nakai, Tomohiro, Ike, Tsukasa, Haruki, Kosuke, Sato, Yoshiyuki
Published in 2018 International Symposium on Semiconductor Manufacturing (ISSM) (01.12.2018)
Published in 2018 International Symposium on Semiconductor Manufacturing (ISSM) (01.12.2018)
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Conference Proceeding
INFORMATION PROCESSING APPARATUS, METHOD, AND PROGRAM
NAKAYAMA KANAKO, NAKAI TOMOHIRO, TSUNOI YASUYUKI, IKE TSUKASA, FUKUYA SAWA, YAMAUCHI YASUAKI, IMOTO KAZUNORI
Year of Publication 11.11.2021
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Year of Publication 11.11.2021
Patent
INFORMATION PROCESSING APPARATUS, METHOD, AND PROGRAM
NAKAYAMA KANAKO, NAKAI TOMOHIRO, TSUNOI YASUYUKI, IKE TSUKASA, FUKUYA SAWA, YAMAUCHI YASUAKI, IMOTO KAZUNORI
Year of Publication 07.02.2019
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Year of Publication 07.02.2019
Patent