Effects of Capping Layers on Surface Oxidation of CoSi2
Won Gyu Lee, Daechul Cho, Ihl Hyun Cho
Published in Journal of industrial and engineering chemistry (Seoul, Korea) (01.11.2004)
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Published in Journal of industrial and engineering chemistry (Seoul, Korea) (01.11.2004)
Journal Article
Novel test structures for on-chip characterization of coupling capacitance variation by in- and anti-phase crosstalk in multi-level metallization
Hi-Deok Lee, Hee-Hwan Ji, In-Sik Han, Han-Soo Joo, Dae-Mann Kim, Sung-Hyung Park, Heui-Seung Lee, Won-Joon Ho, Dae-Byung Kim, Ihl-Hyun Cho, Sang-Young Kim, Sung-Bo Hwang, Jeong-Gon Lee, Jin-Won Park
Published in 2006 IEEE International Conference on Microelectronic Test Structures (2006)
Published in 2006 IEEE International Conference on Microelectronic Test Structures (2006)
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Conference Proceeding
Characterization and integration of new porous low- k dielectric ( k < 2.3) for 65 nm technology and beyond
Choi, Kyeong-Keun, Cho, Ihl Hyun, Park, Sang Jong, Lim, Jung Eun, Jung, Oh Jin, Park, Jong Hyuk, Min, Byung Seung, Hwang, Sung Bo, Ko, Min Jin, Lee, Jeong Gun
Published in Thin solid films (23.04.2007)
Published in Thin solid films (23.04.2007)
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Journal Article
Conference Proceeding
Effect of Wet Etched Thickness and Reoxidation on Reliability of Dual Gate Oxide for Sub-Quarter Micron Complementary Metal-Oxide-Semiconductor Devices
Cho, Ihl Hyun, Sung, Nag Kyunn, Oh, Jong Hyuk, Park, Min Soo, Sohn, Dong Kyun, Park, Jin Won
Published in Japanese Journal of Applied Physics (2000)
Published in Japanese Journal of Applied Physics (2000)
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Journal Article
Investigation of Pt/γ-Al2O3 catalysts prepared by sol-gel method : XAFS and ethane hydrogenolysis
IHL HYUN CHO, SEUNG BIN PARK, SUNG JUNE CHO, RYONG RYOO
Published in Journal of catalysis (25.01.1998)
Published in Journal of catalysis (25.01.1998)
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Journal Article
Abnormal growth of LPCVD SiO2 on CoSi2 by high dose As implantation
IHL HYUN CHO, NAK KYUN SUNG, HYUN SUK SHIM, RYU, Hyuk-Hyun, JAE HEE HA, WON GYU LEE
Published in Thin solid films (23.06.2003)
Published in Thin solid films (23.06.2003)
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Journal Article
Abnormal silicon oxide growth on cobalt silicide in arsenic-doped N+ active areas
Lee, Won Gyu, Sung, Nak Kyun, Cho, Ihl Hyun, Ryu, Hyuk Hyun
Published in Materials letters (01.07.2003)
Published in Materials letters (01.07.2003)
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Journal Article
Thermal Immune NiSi Technology for Nano-scale CMOSFETs
Hi-Deok Lee, Soon-Young Oh, Yong-Jin Kim, Won-Jae Lee, In-Shik Han, Ihl-Hyun Cho, Sung-Bo Hwang, Jong-Gun Lee
Published in 2006 International Workshop on Junction Technology (2006)
Published in 2006 International Workshop on Junction Technology (2006)
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Conference Proceeding
Gate oxide thinning effects at the edge of shallow trench isolation in the dual gate oxide process
Seok-Woo Lee, Ihl Hyun Cho, Sang Hyuk Park, Hong Goo Choi, Nam Gawk Kim, Jong-Kwan Kim, Sang Beom Han, KyungHo Lee
Published in ICVC '99. 6th International Conference on VLSI and CAD (Cat. No.99EX361) (1999)
Published in ICVC '99. 6th International Conference on VLSI and CAD (Cat. No.99EX361) (1999)
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Conference Proceeding
Abnormal growth of LPCVD SiO 2 on CoSi 2 by high dose As implantation
Cho, Ihl Hyun, Sung, Nak Kyun, Shim, Hyun Suk, Ryu, Hyuk-Hyun, Ha, Jae Hee, Lee, Won Gyu
Published in Thin solid films (2003)
Published in Thin solid films (2003)
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Journal Article
Investigation of Pt/γ-Al2O3Catalysts Prepared by Sol–Gel Method: XAFS and Ethane Hydrogenolysis
Cho, Ihl Hyun, Park, Seung Bin, Cho, Sung June, Ryoo, Ryong
Published in Journal of catalysis (25.01.1998)
Published in Journal of catalysis (25.01.1998)
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Journal Article
Investigation of Pt/γ-Al2O3Catalysts Prepared by Sol–Gel Method
Cho, Ihl Hyun, Park, Seung Bin, Cho, Sung June, Ryoo, Ryong
Published in Journal of catalysis (01.01.1998)
Published in Journal of catalysis (01.01.1998)
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Journal Article
Characterization of MoAl2O3 sol-gel catalyst by 27Al nuclear magnetic resonance spectroscopy
Cho, Ihl Hyun, Park, Seung Bin, Kwak, Ja Hun
Published in Journal of molecular catalysis. A, Chemical (01.01.1996)
Published in Journal of molecular catalysis. A, Chemical (01.01.1996)
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Journal Article