Improved pumping speeds of oxygen-free palladium/titanium nonevaporable getter coatings and suppression of outgassing by baking under oxygen
Miyazawa, Tetsuya, Kano, Yu, Nakayama, Yasuo, Ozawa, Kenichi, Iga, Toshiharu, Yamanaka, Misao, Hashimoto, Ayako, Kikuchi, Takashi, Mase, Kazuhiko
Published in Journal of vacuum science & technology. A, Vacuum, surfaces, and films (01.03.2019)
Published in Journal of vacuum science & technology. A, Vacuum, surfaces, and films (01.03.2019)
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