Fabrication of nanocrystalline silicon with small spread of particle size by pulsed gas plasma
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Conference Proceeding
Journal Article
Nanocrystalline silicon formation in a SiH4 plasma cell
Otobe, Masanori, Kanai, Tomonori, Ifuku, Toru, Yajima, Hiroshi, Oda, Shunri
Published in Journal of non-crystalline solids (01.05.1996)
Published in Journal of non-crystalline solids (01.05.1996)
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Journal Article
Nanocrystalline silicon formation in a SiH4 plasma cell
OTOBE, M, KANAI, T, IFUKU, T, YAJIMA, H, ODA, S
Published in Journal of non-crystalline solids (1996)
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Published in Journal of non-crystalline solids (1996)
Conference Proceeding
Thermoelectric properties of oxide ceramics
Tsuchida, Kiyoshi, Tanaka, Yasunori, Ifuku, Toshihiro, Nakao, Yoshihiro, Matsuda, Takanori, Nagashima, Satoko, Maeda, Hideaki, Kato, Akio
Published in The Korean journal of chemical engineering (01.09.1996)
Published in The Korean journal of chemical engineering (01.09.1996)
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Journal Article
FILM FORMATION METHOD AND FILM FORMATION DEVICE
ITABASHI KEN, IFUKU RYOTA, KATO TAKAAKI, AITA MICHITAKA, YAMADA KAZUKI
Year of Publication 27.09.2024
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Year of Publication 27.09.2024
Patent