Novel SEM based imaging using secondary electron spectrometer for enhanced voltage contrast and bottom layer defect review
Avinun-Kalish, M., Sagy, O., Seong Moon Im, ChangHwan Lee, Jaehyoung Oh, Jungyeon Lim, Chulhong Kim, Hyungwon Yoo
Published in 2009 IEEE/SEMI Advanced Semiconductor Manufacturing Conference (01.05.2009)
Published in 2009 IEEE/SEMI Advanced Semiconductor Manufacturing Conference (01.05.2009)
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Conference Proceeding
Methodology for N% recovery post PM for aged/non-annealed SPA oxynitride gate without XPS referencing
JaeHyun Kim, ChangHwan Lee, SeongJun Heo, HyungWon Yoo, ChulHong Kim, Sungchul Yoo, Nam Hee Yoon, Zhiming Jiang, Hwan Seong Moon
Published in 2010 International Symposium on Semiconductor Manufacturing (ISSM) (01.10.2010)
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Published in 2010 International Symposium on Semiconductor Manufacturing (ISSM) (01.10.2010)
Conference Proceeding