Recent advances in silicon etching for MEMS using the ASE™ process
Hynes, A.M., Ashraf, H., Bhardwaj, J.K., Hopkins, J., Johnston, I., Shepherd, J.N.
Published in Sensors and actuators. A. Physical. (20.04.1999)
Published in Sensors and actuators. A. Physical. (20.04.1999)
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Journal Article