High-Speed Wafer Temperature Control Approach of Step Chiller for Semiconductor Manufacturing Equipment
Yun, Hyeonjun, Kwon, Hyeseon, Yeh, Sangsu, Lee, Minsu, Kim, Jonghwa, Kim, Yunha, Cha, Seungwoo, Kang, Mingu, Nam, Jooyeop
Published in IECON 2023- 49th Annual Conference of the IEEE Industrial Electronics Society (16.10.2023)
Published in IECON 2023- 49th Annual Conference of the IEEE Industrial Electronics Society (16.10.2023)
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Conference Proceeding
Practical Synchronization of Heterogeneous Multi-agent System Using Adaptive Law for Coupling Gains
Seungjoon Lee, Hyeonjun Yun, Hyungbo Shim
Published in 2018 Annual American Control Conference (ACC) (01.06.2018)
Published in 2018 Annual American Control Conference (ACC) (01.06.2018)
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Conference Proceeding
Design and Simulation of Symmetric Wafer-to-Wafer Bonding Compesating a Gravity Effect
Lim, Kyeongbin, Han, Minsoo, Jo, Gwanghee, Yun, Hyeonjun, Lee, Jewon, Kim, Jun Hyung, Seok, SeungDae, Rhee, Minwoo Daniel
Published in 2020 IEEE 70th Electronic Components and Technology Conference (ECTC) (01.06.2020)
Published in 2020 IEEE 70th Electronic Components and Technology Conference (ECTC) (01.06.2020)
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Conference Proceeding
State-space analysis of discrete-time disturbance observer for sampled-data control systems
Hyeonjun Yun, Gyunghoon Park, Hyungbo Shim, Chang, H. J.
Published in 2016 American Control Conference (ACC) (01.07.2016)
Published in 2016 American Control Conference (ACC) (01.07.2016)
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Conference Proceeding
Journal Article
A preliminary result on frequency-shaped model predictive control
Hyeonjun Yun, Chang, H. J., Hyungbo Shim, Seo, Jin Heon
Published in 2015 54th IEEE Conference on Decision and Control (CDC) (01.12.2015)
Published in 2015 54th IEEE Conference on Decision and Control (CDC) (01.12.2015)
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Conference Proceeding
A Study on H₂SO₄-Treated M x O y Catalysts for Styrenated Phenols by Alkylation of Phenol with Styrene
Yun, Hyeonjun, Lee, Yeongho, Cho, Jangho, Chung, Minchul, Jung, Sunghun, Kwak, Wonbong, Ahn, Ho-Geun
Published in Journal of nanoscience and nanotechnology (01.02.2018)
Published in Journal of nanoscience and nanotechnology (01.02.2018)
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Journal Article
MASK APPARATUS
MINSOO SHIN, SEONG MIN KIM, JU HYUN LEE, HYEONJUN YUN, CHANG SIK PARK
Year of Publication 09.03.2023
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Year of Publication 09.03.2023
Patent
Reduced-order dynamic observer error linearization for discrete-time systems
Hyeonjun Yun, Jongwook Yang, Jin Heon Seo
Published in 2012 IEEE 51st IEEE Conference on Decision and Control (CDC) (01.12.2012)
Published in 2012 IEEE 51st IEEE Conference on Decision and Control (CDC) (01.12.2012)
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Conference Proceeding
Preparation of Styrenated Phenol by Alkylation of Phenol with Styrene Over SO₄²⁻ /ZrO₂ Catalyst
Yun, Hyeonjun, Lee, Yeongho, Son, Seokhwan, Chung, Minchul, Jang, Mikyeong, Shin, Eun Ju, Jung, Sunghun, Kwak, Wonbong, Jeong, Woon-Jo, Ahn, Ho-Geun
Published in Journal of nanoscience and nanotechnology (01.04.2017)
Published in Journal of nanoscience and nanotechnology (01.04.2017)
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Journal Article
Singular Perturbation for Sampled-Data Systems With Fast SubsystemsThis work was partially supported by Korea Electric Power Corporation through Korea Electrical Engineering & Science Research Institute [grant number:R15XA03-47], Global Research Laboratory Program through the NRF funded by the MSIP (2013K1A1A2A02078326), DGIST Research and Development Program (CPS Global Center) funded by the MSIP, and National Research Foundation of Korea - Grant funded by the Korean Government (NRF-2014R1A1A10
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Journal Article
Wafer to wafer bonding apparatuses
Lee, Jewon, Lim, Kyeongbin, Yun, Hyeonjun, Seok, Seungdae, Han, Minsoo, Kim, Junhyung, Jo, Gwanghee
Year of Publication 13.09.2022
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Year of Publication 13.09.2022
Patent
WAFER TO WAFER BONDING METHODS AND WAFER TO WAFER BONDING APPARATUSES
Lee, Jewon, Yun, Hyeonjun, Seok, Seungdae, Han, Minsoo, Kim, Junhyung, LIM, Kyeongbin, Jo, Gwanghee
Year of Publication 07.01.2021
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Year of Publication 07.01.2021
Patent