2D fluid simulation of capacitively coupled plasma with cylindrical electrode for roll-to-roll processing
Wi, Sung-Suk, Han, Moon-Ki, Kim, Dong-Hyun, Lee, HaeJune, Lee, Ho-Jun, Lim, Jonghyeuk, Jun, Hyun-Su, Hwang, DuSeop, Lee, YoungJin
Published in Current applied physics (01.11.2015)
Published in Current applied physics (01.11.2015)
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