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"Huh, Sung-Min"
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"Huh, Sung-Min"
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Angular Dependence of the Etch Rates of TaN in CF[sub 4]/Ar and CHF[sub 3]/Ar Plasmas
by
Jang, Il-Yong
,
Lee, Jin-Kwan
,
Lee, Seung-Hang
,
Huh
,
Sung
-
Min
,
Kwon, Hyuk Joo
,
Kim, Seong-Sue
,
Cho, HanKu
,
Moon, Sang Heup
Published in
Journal of the Electrochemical Society
(2008)
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REFLECTION MASK FOR EUV LITHOGRAPHY, SYSTEM FOR EUV LITHOGRAPHY AND METHOD FOR FIXING THE REFLECTION MASK FOR EUV LITHOGRAPHY
by
HUH
,
SUNG MIN
,
LEE, DONG GUN
,
KANG, IN YONG
Year of Publication
28.06.2012
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Patent
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EXTREME ULTRAVIOLET PHOTOMASK AND METHOD AND APPARATUS FOR FABRICATING THE SAME
by
JANG, IL YONG
,
HUH
,
SUNG MIN
,
WOO, SANG GYUN
Year of Publication
21.06.2010
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REFLECTIVE PHOTOMASK AND METHOD FOR OPTIMIZING THICKNESSES OF LAYERS IN THE SAME
by
AHN, BYOUNG SUP
,
HWANGBO, CHANG KWON
,
KANG, HEE YOUNG
,
HUH
,
SUNG MIN
Year of Publication
01.07.2009
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DATA COMMUNICATING METHOD AND DEVICE
by
CHOE, DONG-SOO
,
KIM, INN
,
CHOE, YANG-HOON
,
HUH
,
SUNG
-
MIN
Year of Publication
15.06.1998
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Binary photomask having a compensation layer and method of manufacturing the same
by
JUNG JIN-SIK,KIM HEE-BOM,HAN WOO-
SUNG
,
HUH SUNG
-
MIN
Year of Publication
07.03.2007
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LITHOGRAPHIC APPARATUS
by
HUH
,
SUNG MIN
,
CHOI, JIN
Year of Publication
11.03.2009
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PHOTOMASK AND METHOD FOR PRODUCTION OF THE SAME
by
HUH
,
SUNG MIN
,
CHOI, JIN
Year of Publication
08.10.2008
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Reflecting mask, apparatus for fixing the reflecting mask and method of fixing the reflecting mask
by
Huh
,
Sung
-
Min
,
Lee, Suk-Ho
Year of Publication
21.12.2010
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Reflective photomask, method of fabricating the same, and reflective blank photomask
by
KIM HEE-BOM
,
HUH SUNG
-
MIN
Year of Publication
05.01.2010
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Reflective photomask, method of fabricating the same, and reflective blank photomask
by
Huh
,
Sung
-
min
,
Kim, Hee-bom
Year of Publication
05.01.2010
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Photomask and method of manufacturing the same
by
PARK JIN-HYUNG
,
HUH SUNG
-
MIN
Year of Publication
21.07.2009
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Photomask and method of manufacturing the same
by
Park, Jin-hyung
,
Huh
,
Sung
-
min
Year of Publication
21.07.2009
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Microscope and method of providing image data using the same
by
Kim, Dong-wan
,
Lee, Dong-gun
,
Huh
,
Sung
-
min
Year of Publication
06.12.2011
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Microscope and method of providing image data using the same
by
LEE DONG-GUN
,
KIM DONG-WAN
,
HUH SUNG
-
MIN
Year of Publication
06.12.2011
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EUV exposure apparatus for in-situ exposing of substrate and cleaning of optical element included apparatus and method of cleaning optical element included in apparatus
by
LEE DONG-GUN
,
HUH SUNG
-
MIN
Year of Publication
17.04.2008
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Reflecting mask, apparatus for fixing the reflecting mask and method of fixing the reflecting mask
by
HUH SUNG
-
MIN
,
LEE SUK-HO
Year of Publication
21.12.2010
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EUV EXPOSURE APPARATUS IN-SITU PERFORMING EXPOSING SUBSTRATE AND CLEANING OPTICAL ELEMENT AND CLEANING METHOD OF OPTICAL ELEMENT INCLUDED IN THE APPARATUS
by
HUH
,
SUNG MIN
,
LEE, DONG GUN
Year of Publication
27.03.2008
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REFLECTION TYPE PHOTOMASK, METHOD OF MANUFACTURING THE SAME, AND REFLECTION TYPE BLANK PHOTOMASK
by
KIM HEE-BOM
,
HUH SUNG
-
MIN
Year of Publication
04.10.2007
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Photo mask having assist pattern and method of fabricating the same
by
Kim, Hee-bom
,
Lee, Jeung-woo
,
Huh
,
Sung
-
min
Year of Publication
13.07.2010
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