A MANUFACTURING METHOD OF COLLOIDAL SILICA FOR CHEMICAL MECHENICAL POLISHING
KIM, SEOK JOO, HAN, DEOK SU, LEE, JIN HO, LIM, HYUNG MI, KIM, DAE SUNG, LEE, SEUNG HO, JEONG, EUN IL, JEONG, JEONG HWAN, PARK, HYU BUM, HUH, SOO HYUN
Year of Publication 11.02.2011
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Year of Publication 11.02.2011
Patent
Effect of the average particle size and the surface oxidation layer of silicon on the colloidal silica particle through direct oxidation
Na, Won Kyun, Lim, Hyung Mi, Huh, Soo Hyun, Park, Sang Eon, Lee, Youn-Seoung, Lee, Seung Ho
Published in Materials science & engineering. B, Solid-state materials for advanced technology (15.07.2009)
Published in Materials science & engineering. B, Solid-state materials for advanced technology (15.07.2009)
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Journal Article