The role of oxygen in magnetron-sputtered Ta3N5 thin films for the photoelectrolysis of water
Rudolph, M., Stanescu, D., Alvarez, J., Foy, E., Kleider, J.-P., Magnan, H., Minea, T., Herlin-Boime, N., Bouchet-Fabre, B., Hugon, M.-C.
Published in Surface & coatings technology (15.09.2017)
Published in Surface & coatings technology (15.09.2017)
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Journal Article
Oxygen incorporated during deposition determines the crystallinity of magnetron-sputtered Ta3N5 films
Rudolph, M., Vickridge, I., Foy, E., Alvarez, J., Kleider, J.-P., Stanescu, D., Magnan, H., Herlin-Boime, N., Bouchet-Fabre, B., Minea, T., Hugon, M.-C.
Published in Thin solid films (01.09.2019)
Published in Thin solid films (01.09.2019)
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Journal Article
Atomic layer deposition of tantalum nitride based thin films from cyclopentadienyl type precursor
Anacleto, A. Correia, Zauner, A., Cany-Canian, D., Gatineau, J., Hugon, M.-C.
Published in Thin solid films (29.10.2010)
Published in Thin solid films (29.10.2010)
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Journal Article
Interface study between nanostructured tantalum nitride films and carbon nanotubes grown by chemical vapour deposition
Bouchet-Fabre, B., Pinault, M., Foy, E., Hugon, M.C., Minéa, T., Mayne-L’Hermite, M.
Published in Applied surface science (01.10.2014)
Published in Applied surface science (01.10.2014)
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Conference Proceeding
Study of a HPPMS discharge in Ar/O2 mixture: II. Plasma optical emission and deposited RuOx film properties
Benzeggouta, D, Hugon, M C, Bretagne, J
Published in Plasma sources science & technology (01.11.2009)
Published in Plasma sources science & technology (01.11.2009)
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Journal Article
Study of a HPPMS discharge in Ar/O2 mixture: I. Discharge characteristics with Ru cathode
Benzeggouta, D, Hugon, M C, Bretagne, J, Ganciu, M
Published in Plasma sources science & technology (01.11.2009)
Published in Plasma sources science & technology (01.11.2009)
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Journal Article
Influence of the structure and composition of titanium nitride substrates on carbon nanotubes grown by chemical vapour deposition
Morales, M, Cucatti, S, Acuña, J J S, Zagonel, L F, Antonin, O, Hugon, M C, Marsot, N, Bouchet-Fabre, B, Minea, T, Alvarez, F
Published in Journal of physics. D, Applied physics (17.04.2013)
Published in Journal of physics. D, Applied physics (17.04.2013)
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Journal Article
Nanostructured tantalum nitride films as buffer-layer for carbon nanotube growth
Jin, C., Delmas, M., Aubert, P., Alvarez, F., Minéa, T., Hugon, M.C., Bouchet-Fabre, B.
Published in Thin solid films (01.04.2011)
Published in Thin solid films (01.04.2011)
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Conference Proceeding
Investigation of lanthanum and hafnium-based dielectric films by X-ray reflectivity, spectroscopic ellipsometry and X-ray photoelectron spectroscopy
Edon, V., Hugon, M.-C., Agius, B., Durand, O., Eypert, C., Cardinaud, C.
Published in Thin solid films (30.09.2008)
Published in Thin solid films (30.09.2008)
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Conference Proceeding
Investigation of BST thin films deposited by RF magnetron sputtering in pure Argon
Challali, F., Besland, M.P., Benzeggouta, D., Borderon, C., Hugon, M.C., Salimy, S., Saubat, J.C., Charpentier, A., Averty, D., Goullet, A., Landesman, J.P.
Published in Thin solid films (01.06.2010)
Published in Thin solid films (01.06.2010)
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Journal Article
Conference Proceeding
Tantalum based coated substrates for controlling the diameter of carbon nanotubes
Bouchet-Fabre, B., Djomkam, A. Fadjie, Delmas, M., Jin, C., Antonin, O., Hugon, M.C., Mayne-L’Hermite, M.F., Alvarez, F., Minéa, T.
Published in Carbon (New York) (01.12.2009)
Published in Carbon (New York) (01.12.2009)
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Journal Article
TaSiN diffusion barriers deposited by reactive magnetron sputtering
Letendu, F., Hugon, M.C., Agius, B., Vickridge, I., Berthier, C., Lameille, J.M.
Published in Thin solid films (14.08.2006)
Published in Thin solid films (14.08.2006)
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Journal Article
New type of plasma reactor for thin film deposition: magnetron plasma process assisted by microwaves to ionise sputtered vapour
Boisse-Laporte, C., Leroy, O., de Poucques, L., Agius, B., Bretagne, J., Hugon, M.C., Teulé-Gay, L., Touzeau, M.
Published in Surface & coatings technology (23.02.2004)
Published in Surface & coatings technology (23.02.2004)
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Journal Article
EFFECTS OF NITROGEN INCORPORATION IN LANTHANUM-BASED DIELECTRIC FILMS
Edon, V., Hugon, M.-C., Agius, B., Bastos, K. P., Miotti, L., Driemeier, C., Salvador, L., Krug, C., Baumvol, I. J. R., Eypert, C., Durand, O.
Published in Integrated ferroelectrics (01.01.2008)
Published in Integrated ferroelectrics (01.01.2008)
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Journal Article
Study of a HPPMS discharge in Ar/O 2 mixture: I. Discharge characteristics with Ru cathode
Benzeggouta, D, Hugon, M C, Bretagne, J, Ganciu, M
Published in Plasma sources science & technology (01.11.2009)
Published in Plasma sources science & technology (01.11.2009)
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Journal Article
IPVD deposition of titanium based thin films
Imbert, J.C., de Poucques, L., Boisse-Laporte, C., Bretagne, J., Hugon, M.C., Teulé-Gay, L., Touzeau, M., Shtansky, D., Voldoire, O.
Published in Surface & coatings technology (01.10.2005)
Published in Surface & coatings technology (01.10.2005)
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Journal Article
Effects of sputter deposition parameters and post-deposition annealing on the electrical characteristics of LaAlO3 dielectric films on Si
EDON, V, HUGON, M. C, AGIUS, B, MIOTTI, L, RADTKE, C, TATSCH, F, GANEM, J. J, TRIMAILLE, I, BAUMVOL, I. J. R
Published in Applied physics. A, Materials science & processing (01.05.2006)
Published in Applied physics. A, Materials science & processing (01.05.2006)
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Journal Article
Experimental study of a radio-frequency Ionized Physical Vapour Deposition process: Contamination by the internal coil
Imbert, J.-C., de Poucques, L., Boisse-Laporte, C., Bretagne, J., Hugon, M.C., Pagnon, D., Pitach, P., Teulé-Gay, L., Touzeau, M.
Published in Thin solid films (02.06.2008)
Published in Thin solid films (02.06.2008)
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Journal Article
Structural and electrical properties of the interfacial layer in sputter deposited LaAlO3/Si thin films
EDON, V, HUGON, M. C, AGIUS, B, COHEN, C, CARDINAUD, C. H, EYPERT, C
Published in Thin solid films (31.07.2007)
Published in Thin solid films (31.07.2007)
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