Thermal Atomic Layer Etching of MoS2 Using MoF6 and H2O
Soares, Jake, Mane, Anil U., Choudhury, Devika, Letourneau, Steven, Hues, Steven M., Elam, Jeffrey W., Graugnard, Elton
Published in Chemistry of materials (14.02.2023)
Published in Chemistry of materials (14.02.2023)
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Journal Article
Thermal Atomic Layer Etching of MoS 2 Using MoF 6 and H 2 O
Soares, Jake, Mane, Anil U, Choudhury, Devika, Letourneau, Steven, Hues, Steven M, Elam, Jeffrey W, Graugnard, Elton
Published in Chemistry of materials (14.02.2023)
Published in Chemistry of materials (14.02.2023)
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Journal Article
Effect of Cluster Ion Analysis Fluence on Interface Quality in SIMS Molecular Depth Profiling
Szakal, Christopher, Hues, Steven M, Bennett, Joe, Gillen, Greg
Published in Journal of physical chemistry. C (01.04.2010)
Published in Journal of physical chemistry. C (01.04.2010)
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Journal Article
Effect of hydrogen substitution on the mass spectrometry and size-exclusion chromatography of perfluorinated polyether fluids as determined by time-of-flight secondary ion mass spectrometry
Hues, Steven M, Wyatt, Jeffrey R, Colton, Richard J, Black, Bruce H
Published in Analytical chemistry (Washington) (15.05.1990)
Published in Analytical chemistry (Washington) (15.05.1990)
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Journal Article
Adsorption of a metal deactivator additive onto metal surfaces
Schreifels, John A, Morris, Robert E, Turner, Noel H, Mowery, Robert L, Hues, Steven M
Published in Energy & fuels (01.03.1991)
Published in Energy & fuels (01.03.1991)
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Journal Article
Conference Proceeding
Determination of hydrogen in perfluorinated polyalkylethers using time-of-flight secondary ion mass spectrometry, infrared spectroscopy, and nuclear magnetic resonance spectrometry
Hues, Steven M, Colton, Richard J, Mowery, Robert L, McGrath, Kenneth J, Wyatt, Jeffrey R
Published in Applied surface science (01.02.1989)
Published in Applied surface science (01.02.1989)
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Journal Article
Atomic Layer Processing of MoS2
Jen, Wesley, Hues, John D., Soares, Jake, Letourneau, Steven, Lawson, Matthew, Choudhury, Devika, Mane, Anil U., Lu, Yu, Wu, Yaqiao, Hues, Steven M., Li, Lan, Elam, Jeffrey W., Graugnard, Elton
Published in 2023 IEEE Workshop on Microelectronics and Electron Devices (WMED) (01.03.2023)
Published in 2023 IEEE Workshop on Microelectronics and Electron Devices (WMED) (01.03.2023)
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Conference Proceeding
Processes for testing a region for an analyte and a process for forming an electronic device
HUES STEVEN M, FAKHREDDINE HASSAN F, SIELOFF DAVID D, LOVEJOY MICHAEL L
Year of Publication 05.05.2009
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Year of Publication 05.05.2009
Patent