ALLOY TARGET FOR CONDUCTIVE FILM OR ITS PROTECTION LAYER AND MANUFACTURING METHOD THEREOF
CHAO CHIH HSIAO, HUANG TIEN WANG, CHANG YIH, CHEN HUNG HUA, CHANG JIIN CHYUAN
Year of Publication 13.09.2006
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Year of Publication 13.09.2006
Patent
Alloy target for conductive film or its protection layer and manufacturing method thereof
HUANG, TIEN-WANG, CHANG, YIH, CHAO, CHIH-HSIAO, CHANG, JIINYUAN, CHEN, HUNG-HUA
Year of Publication 11.05.2006
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Year of Publication 11.05.2006
Patent