Method for forming contact plug layout
Tung, Yu-Cheng, Feng, Li-Wei, Huang, Emily SH, Ho, Chien-Ting, Wang, Ying-Chiao
Year of Publication 01.01.2019
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Year of Publication 01.01.2019
Patent
METHOD FOR FORMING CONTACT PLUG LAYOUT
Tung, Yu-Cheng, Feng, Li-Wei, Huang, Emily SH, Ho, Chien-Ting, Wang, Ying-Chiao
Year of Publication 13.09.2018
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Year of Publication 13.09.2018
Patent