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Published in Journal of Toxicology and Environmental Health, Part A (24.07.1998)
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Published in Cancer epidemiology, biomarkers & prevention (01.08.1997)
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Year of Publication 04.11.2003
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Study of high density plasma etch for borderless contact to solve bottom anti-reflective coating defect for beyond 0.18 /spl mu/m VLSI technology
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Published in 2001 IEEE International Symposium on Semiconductor Manufacturing. ISSM 2001. Conference Proceedings (Cat. No.01CH37203) (2001)
Published in 2001 IEEE International Symposium on Semiconductor Manufacturing. ISSM 2001. Conference Proceedings (Cat. No.01CH37203) (2001)
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Conference Proceeding