METHOD AND RECORDING MEDIUM OF REDUCING CHEMOEPITAXY DIRECTED SELF-ASSEMBLED DEFECTS
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Year of Publication 08.11.2018
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Year of Publication 08.11.2018
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Method and recording medium of reducing chemoepitaxy directed self-assembled defects
Lai, Kafai, Raghunathan, Ananthan, Liu, Chi-Chun, Guillorn, Michael A, Tsai, Hsinyu
Year of Publication 30.10.2018
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Year of Publication 30.10.2018
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Directed self-assembly
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Year of Publication 25.09.2018
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Pattern decomposition method for wiring patterns with chemoepitaxy based directed self assembly
Lai, Kafai, Cheng, Joy, Guillorn, Michael A, Doerk, Gregory S, Brink, Markus, Tsai, Hsinyu
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Year of Publication 31.07.2018
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Directed self-assembly
Cheng Joy, Liu Chi-Chun, Tsai Hsinyu, Pitera Jed W, Guillorn Michael A
Year of Publication 06.02.2018
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Year of Publication 06.02.2018
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