Novel post CMP cleaning using buffered HF solution and ozone water
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Journal Article
Conference Proceeding
The removal of airborne molecular contamination in cleanroom using PTFE and chemical filters
Ching-Fa Yeh, Chih-Wen Hsiao, Shiuan-Jeng Lin, Chih-Min Hsieh, Kusumi, T., Aomi, H., Kaneko, H., Bau-Tong Dai, Ming-Shih Tsai
Published in IEEE transactions on semiconductor manufacturing (01.05.2004)
Published in IEEE transactions on semiconductor manufacturing (01.05.2004)
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Journal Article
A Driving Behavior Detection Based on a Zigbee Network for Moving Vehicles
Wen-Chih Hsiao, Mong-Fong Horng, Yun-Je Tsai, Tsong-Yi Chen, Bin-Yih Liao
Published in 2012 Conference on Technologies and Applications of Artificial Intelligence (01.11.2012)
Published in 2012 Conference on Technologies and Applications of Artificial Intelligence (01.11.2012)
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Conference Proceeding
國民小學教師正向領導與學生學習表現關係之研究
謝傳崇(Hsieh, Chuan-chung), 蕭文智(Hsiao, Wen-chih), 王玉美(Wang, Yu-mei)
Published in School Administrators (01.01.2015)
Published in School Administrators (01.01.2015)
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Journal Article
Coexistence of hepatoma with mantle cell lymphoma in a hepatitis B carrier
Lee, Mu-Hsien, Lin, Yu-Ching, Cheng, Hao-Tsai, Chuang, Wen-Yu, Huang, Hsin-Chih, Kao, Hsiao-Wen
Published in World journal of gastroenterology : WJG (07.12.2015)
Published in World journal of gastroenterology : WJG (07.12.2015)
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Journal Article
Impact of airborne molecular contamination to nano-device performance
Ching-Fa Yeh, Chih-Wen Hsiao, Shiuan-Jeng Lin, Zhi-Min Xie, Toshio Kusumi
Published in Proceedings of the 2nd IEEE Conference on Nanotechnology (2002)
Published in Proceedings of the 2nd IEEE Conference on Nanotechnology (2002)
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Conference Proceeding