ULEGlass with Improved Thermal Properties for EUVL Masks and Projection Optics Substrates
Hrdina, Kenneth E, Duran, Carlos A
Published in International journal of applied glass science (01.03.2014)
Published in International journal of applied glass science (01.03.2014)
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Journal Article
ULE®Glass with Improved Thermal Properties for EUVL Masks and Projection Optics Substrates
Hrdina, Kenneth E., Duran, Carlos A.
Published in International journal of applied glass science (01.03.2014)
Published in International journal of applied glass science (01.03.2014)
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Journal Article
Measuring CTE uniformity in ULE glass
HRDINA, Kenneth E, HECKLE, Christine, ACKERMAN, Bradford G, NAVAN, W. David, FANNING, Andrew W
Published in Laser focus world (01.08.2003)
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Published in Laser focus world (01.08.2003)
Magazine Article
SYNTHETIC SILICA GLASS OPTICAL MATERIAL AND METHOD OF PRODUCING IT
BOOKBINDER, Dana C, MOORE, Lisa A, SCHIEFELBEIN, Susan L, HRDINA, Kenneth E, FIACCO, Richard M
Year of Publication 28.06.2017
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Year of Publication 28.06.2017
Patent
METHOD FOR PRODUCING TITANIA-DOPED FUSED SILICA EXTREME ULTRAVIOLET LITHOGRAPHY SUBSTRATES GLASS
MOORE, Lisa A, RUSSO, Nikki J, HRDINA, Kenneth E, ACKERMAN, Bradford G, YU, Chunzhe C
Year of Publication 21.12.2016
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Year of Publication 21.12.2016
Patent
VESSELS FOR MOLTEN SEMICONDUCTING MATERIALS AND METHODS OF MAKING THE SAME
WIGHT, JOHN FORREST JR, HRDINA, KENNETH E, COOK, GLEN BENNETT, THOMAS, CHRISTOPHER S
Year of Publication 05.03.2014
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Year of Publication 05.03.2014
Patent