Uniformity of silicon microcrystallinity in large area RF capacitive reactors
Strahm, Benjamin, Hollenstein, Christoph, Howling, Alan A.
Published in Progress in photovoltaics (01.12.2008)
Published in Progress in photovoltaics (01.12.2008)
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Journal Article
Short CommunicationUniformity of silicon microcrystallinity in large area RF capacitive reactors
Strahm, Benjamin, Hollenstein, Christoph, Howling, Alan A
Published in Progress in photovoltaics (01.12.2008)
Published in Progress in photovoltaics (01.12.2008)
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Journal Article
Numerical Simulation of Rf Resonant Antenna-Plasma Inductive Coupling in Planar Geometry
DrAngola, Antonio, Zaffina, Renato, Furno, Ivo, Howling, Alan A., Jacquier, Remy, Plyushchev, Gennady, Guittienne, Philippe, Panarese, Niccolo
Published in 2017 IEEE International Conference on Plasma Science (ICOPS) (01.05.2017)
Published in 2017 IEEE International Conference on Plasma Science (ICOPS) (01.05.2017)
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Conference Proceeding
A birdcage resonant antenna for helicon wave generation in TORPEX
Simon, Vincent, Guittienne, Philippe, Quigley, Patrick, Sepulchre, Cyrille, Jacquier, Rémy, Bertizzolo, Robert, Baquero-Ruiz, Marcelo, Howling, Alan A, Furno, Ivo
Published in arXiv.org (08.04.2024)
Published in arXiv.org (08.04.2024)
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Paper
Journal Article
Method for producing semi-conducting devices and devices obtained with this method
BALLUTAUD JULIETTE, POPPELLER MARKUS, HOWLING ALAN, KROLL ULRICH, SCHMITT JACQUES, BUCHER CEDRIC, HOLLENSTEIN CHRISTOPH
Year of Publication 15.07.2009
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Year of Publication 15.07.2009
Patent