OPTIMAL DETERMINATION OF AN OVERLAY TARGET
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Year of Publication 30.08.2024
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Year of Publication 30.08.2024
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OPTIMAL DETERMINATION OF AN OVERLAY TARGET USING MACHINE LEARNING
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Year of Publication 30.08.2024
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Year of Publication 30.08.2024
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OVERLAY MONITORING
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Year of Publication 29.10.2021
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Year of Publication 29.10.2021
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e-beam metrology of thin resist for high NA EUVL
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Published in Japanese Journal of Applied Physics (01.06.2023)
Published in Japanese Journal of Applied Physics (01.06.2023)
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OPTIMAL DETERMINATION OF AN OVERLAY TARGET
HOUCHENS, Kevin Ryan, BOMSHTEIN, Nahum, GOPINATHAN, Mohan, PERRY, Jenny, BALODHI, Jatin, MANAPARAMBIL, Arjun Das, SHENOY, Rahul, ITZKOVICH, Tal
Year of Publication 29.08.2024
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Year of Publication 29.08.2024
Patent
OPTIMAL DETERMINATION OF AN OVERLAY TARGET USING MACHINE LEARNING
HOUCHENS, Kevin Ryan, BOMSHTEIN, Nahum, PERRY, Jenny, DUBOVSKI, Bar, YACOBY, Ran, HSIEH, Tung-Yuan, LEVANT, Boris, ITZKOVICH, Tal
Year of Publication 29.08.2024
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Year of Publication 29.08.2024
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Overlay monitoring
Houchens, Kevin Ryan, Shachar, Lavi Jacov, Kaplan, Vladislav, Attal, Shay
Year of Publication 06.07.2021
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Year of Publication 06.07.2021
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OVERLAY MONITORING
KAPLAN, VLADISLAV, SHACHAR, LAVI JACOV, HOUCHENS, KEVIN RYAN, ATTAL, SHAY
Year of Publication 01.05.2022
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Year of Publication 01.05.2022
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Overlay monitoring
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Year of Publication 01.02.2022
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Year of Publication 01.02.2022
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Optimal determination of overlapping targets
HOUCHENS, KEVIN, RYAN, PERRY JEANNE, SHENOY, RAHUL, MANAPARAMBIL, ARJUN, DAS, GOPINATHAN, MOHAN, TAL ITZKOVICH, BOMSTEIN NAHUM, BARODI, JADINE
Year of Publication 23.08.2024
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Year of Publication 23.08.2024
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Overlay monitoring
SHACHAR LAVI JACOV, HOUCHENS KEVIN RYAN, ATTAL SHAY, KAPLAN VLADISLAV
Year of Publication 22.10.2021
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Year of Publication 22.10.2021
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