ION BEAM APPARATUS AND METHOD EMPLOYING MAGNETIC SCANNING
GLAVISH HILTON F, NAITO MASAO, HORSKY THOMAS N, NAGAI NOBUO, HAMAMOTO NARIAKI, JACOBSON DALE CONRAD, HAHTO SAMI K
Year of Publication 12.02.2014
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Year of Publication 12.02.2014
Patent
Optimization of ClusterCarbon™ process parameters for strained Si lattice
Sekar, Karuppanan, Krull, Wade A., Horsky, Thomas N., Feudel, Thomas, Krüger, Christian, Flachowsky, Stefan, Ostermay, Ina
Published in Materials science & engineering. B, Solid-state materials for advanced technology (05.12.2008)
Published in Materials science & engineering. B, Solid-state materials for advanced technology (05.12.2008)
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Journal Article
Optimization of ClusterCarbonTM process parameters for strained Si lattice
Sekar, Karuppanan, Krull, Wade A, Horsky, Thomas N, Feudel, Thomas, Kruger, Christian, Flachowsky, Stefan, Ostermay, Ina
Published in Materials science & engineering. B, Solid-state materials for advanced technology (05.12.2008)
Published in Materials science & engineering. B, Solid-state materials for advanced technology (05.12.2008)
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Journal Article
Novel Ion Source for the Production of Extended Sheet Beams
Horsky, Thomas N., Hahto, Sami K., Yamamoto, Tetsuro
Published in 2016 21st International Conference on Ion Implantation Technology (IIT) (01.09.2016)
Published in 2016 21st International Conference on Ion Implantation Technology (IIT) (01.09.2016)
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Conference Proceeding
High Current Ion Implanter "LUXiON"
Kuwata, Yusuke, Igo, Tetsuya, Tanaka, Kohei, Asai, Hirofumi, Hino, Masayoshi, Umisedo, Sei, Nakashima, Yoshiki, Hamamoto, Nariaki, Hahto, Sami K., Yamamoto, Tetsuro, Une, Hideyasu, Sekar, Karuppanan, Horsky, Thomas N.
Published in 2016 21st International Conference on Ion Implantation Technology (IIT) (01.09.2016)
Published in 2016 21st International Conference on Ion Implantation Technology (IIT) (01.09.2016)
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Conference Proceeding