베어링 디바이스, 자기 중력 보상기, 진동 분리 시스템, 리소그래피 장치, 네거티브 강성을 갖는 중력 보상기를 제어하는 방법, 및 스프링
FISCHER OLOF MARTINUS JOSEPHUS, VENNAT ERIC PIERRE YVES, WIJCKMANS MAURICE WILLEM JOZEF ETIENNE, HUIZINGA THEODORUS MATTHEUS JOANNUS MARIA, BUTLER HANS, HOOGENDAM CHRISTIAAN ALEXANDER, KIMMAN MAARTEN HARTGER, ROVERS JOHANNES MARINUS MARIA
Year of Publication 01.11.2019
Get full text
Year of Publication 01.11.2019
Patent
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
KATE NICOLAAS T, GRAAF ROELOF FREDERICK DE, SMEULERS JOHANNES PETRUS MARIA, VAN DER MEULEN FRITS, DONDERS SJOERD NICOLAAS L, HOOGENDAM CHRISTIAAN ALEXANDER, VERHAGEN MARTINUS CORNELIS MARIA, BELFROID STEFAN PHILIP CHRISTIAAN, VAN DER TOORN JAN-GERARD C, COX HENRIKUS HERMAN MARIE, KEMPER NICOLAAS R, HERMAN MARIA TEUNISSEN FRANCISCUS JOHANNES, VOGEL HERMAN, JEROEN JOHANNES SOPHIA MARIA MERTENS
Year of Publication 16.05.2019
Get full text
Year of Publication 16.05.2019
Patent
리소그래피 장치
LIMPENS PATRICK WILLEM PAUL, DE VRIES GOSSE CHARLES, KOEVOETS ADRIANUS HENDRIK, DE HOOGH JOOST, VAN DER MEULEN FRITS, DE WIT PAUL CORNE HENRI, HOOGENDAM CHRISTIAAN ALEXANDER, VAN DER MEULEN STAN HENRICUS, LEROUX ALAIN LOUIS CLAUDE, LAFARRE RAYMOND WILHELMUS LOUIS, VALENTIN CHRISTIAAN LOUIS, COX HENDRIKUS HERMAN MARIE, VAN DER SANDEN JACOBUS CORNELIS GERARDUS, OVERKAMP JIM VINCENT, HEMSCHOOTE DRIES VAAST PAUL, VAN DER SCHOOT HARMEN KLAAS, DERKS SANDER CATHARINA REINIER, GIJZEN RONALD CORNELIS GERARDUS, VLES DAVID FERDINAND, VAN BERKEL KOOS, CUIJPERS MARTINUS AGNES WILLEM, ARLEMARK ERIK JOHAN, WESTERHUIS EVERT AUKE RINZE
Year of Publication 07.05.2019
Get full text
Year of Publication 07.05.2019
Patent
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
KATE NICOLAAS T, GRAAF ROELOF FREDERICK DE, SMEULERS JOHANNES PETRUS MARIA, VAN DER MEULEN FRITS, DONDERS SJOERD NICOLAAS L, HOOGENDAM CHRISTIAAN ALEXANDER, VERHAGEN MARTINUS CORNELIS MARIA, BELFROID STEFAN PHILIP CHRISTIAAN, VAN DER TOORN JAN-GERARD C, COX HENRIKUS HERMAN MARIE, KEMPER NICOLAAS R, HERMAN MARIA TEUNISSEN FRANCISCUS JOHANNES, VOGEL HERMAN, JEROEN JOHANNES SOPHIA MARIA MERTENS
Year of Publication 21.12.2017
Get full text
Year of Publication 21.12.2017
Patent
SUPPORT APPARATUS LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
WESTERLAKEN JAN STEVEN CHRISTIAAN, OVERKAMP JIM VINCENT, VAN BEIJNUM MAARTEN, KOEVOETS ADRIANUS HENDRIK, JACOBS JOHANNES HENRICUS WILHELMUS, FIEN MENNO, HOOGENDAM CHRISTIAAN ALEXANDER, DONDERS SJOERD NICOLAAS LAMBERTUS, LAFARRE RAYMOND WILHELMUS LOUIS, HOUBEN MARTIJN, TEN KATE NICOLAAS, DE GROOT ANTONIUS FRANCISCUS JOHANNES
Year of Publication 31.10.2016
Get full text
Year of Publication 31.10.2016
Patent
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
KATE NICOLAAS T, GRAAF ROELOF FREDERICK DE, SMEULERS JOHANNES PETRUS MARIA, VAN DER MEULEN FRITS, DONDERS SJOERD NICOLAAS L, HOOGENDAM CHRISTIAAN ALEXANDER, VERHAGEN MARTINUS CORNELIS MARIA, BELFROID STEFAN PHILIP CHRISTIAAN, VAN DER TOORN JAN-GERARD C, COX HENRIKUS HERMAN MARIE, KEMPER NICOLAAS R, HERMAN MARIA TEUNISSEN FRANCISCUS JOHANNES, VOGEL HERMAN, JEROEN JOHANNES SOPHIA MARIA MERTENS
Year of Publication 25.08.2016
Get full text
Year of Publication 25.08.2016
Patent
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
KATE NICOLAAS T, GRAAF ROELOF FREDERICK DE, SMEULERS JOHANNES PETRUS MARIA, VAN DER MEULEN FRITS, DONDERS SJOERD NICOLAAS L, HOOGENDAM CHRISTIAAN ALEXANDER, VERHAGEN MARTINUS CORNELIS MARIA, BELFROID STEFAN PHILIP CHRISTIAAN, VAN DER TOORN JAN-GERARD C, COX HENRIKUS HERMAN MARIE, KEMPER NICOLAAS R, HERMAN MARIA TEUNISSEN FRANCISCUS JOHANNES, VOGEL HERMAN, JEROEN JOHANNES SOPHIA MARIA MERTENS
Year of Publication 28.05.2015
Get full text
Year of Publication 28.05.2015
Patent
SUPPORT APPARATUS, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
WESTERLAKEN JAN STEVEN CHRISTIAAN, OVERKAMP JIM VINCENT, VAN BEIJNUM MAARTEN, KOEVOETS ADRIANUS HENDRIK, JACOBS JOHANNES HENRICUS WILHELMUS, FIEN MENNO, HOOGENDAM CHRISTIAAN ALEXANDER, DONDERS SJOERD NICOLAAS LAMBERTUS, LAFARRE RAYMOND WILHELMUS LOUIS, HOUBEN MARTIJN, TEN KATE NICOLAAS, DE GROOT ANTONIUS FRANCISCUS JOHANNES
Year of Publication 05.03.2015
Get full text
Year of Publication 05.03.2015
Patent
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
KATE NICOLAAS T, GRAAF ROELOF FREDERICK DE, SMEULERS JOHANNES PETRUS MARIA, VAN DER MEULEN FRITS, DONDERS SJOERD NICOLAAS L, HOOGENDAM CHRISTIAAN ALEXANDER, VERHAGEN MARTINUS CORNELIS MARIA, BELFROID STEFAN PHILIP CHRISTIAAN, VAN DER TOORN JAN-GERARD C, COX HENRIKUS HERMAN MARIE, KEMPER NICOLAAS R, HERMAN MARIA TEUNISSEN FRANCISCUS JOHANNES, VOGEL HERMAN, JEROEN JOHANNES SOPHIA MARIA MERTENS
Year of Publication 22.01.2015
Get full text
Year of Publication 22.01.2015
Patent
CONTAMINATION PREVENTION SYSTEM, LITHOGRAPHIC APPARATUS, RADIATION SOURCE, AND METHOD FOR MANUFACTURING A DEVICE
WASSINK ARNOUD CORNELIS, BUIS EDWIN JOHAN, HOOGENDAM CHRISTIAAN ALEXANDER, BROM PAUL PETER ANNA ANTONIUS, STRUYCKEN ALEXANDER MATTHIJS, BIJLAART ERIK THEODORUS MARIA
Year of Publication 07.04.2010
Get full text
Year of Publication 07.04.2010
Patent
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
JACOBS HERNES, JANSEN HANS, VAN DER TOORN JAN GERARD CORNELIS, JANSSEN FRANCISCUS JOHANNES JOSEPH, DE GRAAF ROELOF FREDERIK, HOOGENDAM CHRISTIAAN ALEXANDER, LEENDERS MARTINUS HENDRIKUS ANTONIUS, STREEFKERK BOB, MERTENS JEROEN JOHANNES SOPHIA MARIA, CORNELISSEN SEBASTIAAN MARIA JOHANNES, RIEPEN MICHEL, SMITS PETER, DONDERS SJOERD NICOLAAS LAMBERTUS
Year of Publication 26.12.2011
Get full text
Year of Publication 26.12.2011
Patent
LITHOGRAPHIC APPARATUS AND METHOD FOR FABRICATING DEVICE TO ELIMINATE NECESSITY OF GAS SUPPLY
DONDERS, SJOERD NICOLAAS LAMBERTUS, LOOPSTRA, ERIK ROELOF, KOLESNYCHENKO, ALEKSEY YURIEVICH, HOOGENDAM, CHRISTIAAN ALEXANDER, COX, HENRIKUS HERMAN MARIE, VANSANTEN, HELMAR
Year of Publication 06.01.2005
Get full text
Year of Publication 06.01.2005
Patent
LITHOGRAPHY PROJECTION APPARATUS FILLING SPACE BETWEEN SUBSTRATE AND PROJECTION SYSTEM WITH LIQUID AND METHOD FOR PRODUCING DEVICE
STRAAIJER ALEXANDER, MODDERMAN THEODORUS MARINUS, RITSEMA ROELOF AEILKO SIEBRAND, HOOGENDAM CHRISTIAAN ALEXANDER, MULKENS JOHANNES CATHARINUS HUBERTUS, STREEFKERK BOB, SIMON KLAUS, LOOPSTRA ERIK ROELOF, KOLESNYCHENKO ALEKSEY, DERKSEN ANTONIUS THEODORUS ANNA MARIA, LOF JOERI, DESMIT JOANNES THEODOOR, VANSANTEN HELMAR
Year of Publication 27.05.2004
Get full text
Year of Publication 27.05.2004
Patent
LITHOGRAPHIC APPARATUS WITHOUT LIQUID REDUCTION AND DEVICE MANUFACTURING METHOD
LOOPSTRA ERIK ROELOF, SENGERS TIMOTHEUS FRANCISCUS, STRAAIJER ALEXANDER, HOOGENDAM CHRISTIAAN ALEXANDER, MULKENS JOHANNES CATHARINUS HUBERTUS, DONDERS SJOERD NICOLAAS LAMBERTUS, STREEFKERK BOB, DERKSEN ANTONIUS THEODORUS ANNA MARIA, LOF JOERI, MERTENS JEROEN JOHANNES SOPHIA MARIA
Year of Publication 27.05.2004
Get full text
Year of Publication 27.05.2004
Patent
LITHOGRAPHIC PROJECTION DEVICE FILLED WITH LIQUID AT SPACE BETWEEN FINAL ELEMENT OF PROJECTION SYSTEM AND SENSOR, AND DEVICE MANUFACTURING METHOD
VANSCHAIK, FRANK, DESMIT, JOANNES THEODOOR, MERTENS, JEROEN, JOHANNES, SOPHIA, MARIA, RITSEMA, ROELOF AEILKO SIEBRAND, LOOPSTRA, ERIK ROELOF, STREEFKERK, BOB, MULKENS, JOHANNES CATHARINUS HUBERTUS, LOF, JOERI, HOOGENDAM, CHRISTIAAN ALEXANDER, KOLESNYCHENKO, ALEKSEY, OTTENS, JOOST JEROEN, SENGERS, TIMOTHEUS FRANCISCUS, KROON, MARK, DONDERS, SJOERD NICOLAAS LAMBERTUS, SIMON, KLAUS, VANDEKERKHOF, MARCUS ADRIANUS, DENBOEF, ARIE, JEFFREY, STRAAIJER, ALEXANDER, BUTLER, HANS, MEIJER, HENDRICUS JOHANNES MARIA, VANSANTEN, HELMAR, BIJLAART, ERIK THEODORUS MARIA
Year of Publication 16.12.2004
Get full text
Year of Publication 16.12.2004
Patent
LITHOGRAPHY APPARATUS AND METHOD FOR FABRICATING DEVICE TO REDUCE RESIDUAL LIQUID LEFT ON SUBSTRATE AFTER EXPOSURE PROCESS IS PERFORMED BY PROJECTION SYSTEM
BAKKER LEVINUS PIETER, STRAAIJER ALEXANDER, VANNUNEN GERARDUS PETRUS MATTHIJS, VANDERMEULEN FRITS, BASELMANS JOHANNES JACOBUS MATHEUS, HOOGENDAM CHRISTIAAN ALEXANDER, MULKENS JOHANNES CATHARINUS HUBERTUS, SLAGHEKKE BERNARDUS ANTONIUS, STREEFKERK BOB, SIMON KLAUS, MERTENS JEROEN JOHANNES SOPHIA MARIA, VANDERTOORN JAN GERARD CORNELIS, LOOPSTRA ERIK ROELOF, HOUKES MARTIJN, COX HENRIKUS HERMAN MARIE, DONDERS SJOERD NICOLAAS LAMBERTUS, DERKSEN ANTONIUS THEODORUS ANNA MARIA, LOF JOERI
Year of Publication 20.11.2004
Get full text
Year of Publication 20.11.2004
Patent
LITHOGRAPHY PROJECTION APPARATUS MINIMIZING LOSS OF LIQUID FROM LIQUID SUPPLY SYSTEM AND PROCESS FOR PRODUCING DEVICE
SENGERS TIMOTHEUS FRANCISCUS, STRAAIJER ALEXANDER, VANSCHAIK FRANK, RITSEMA ROELOF AEILKO SIEBRAND, MULKENS JOHANNES CATHARINUS HUBERTUS, BUTLER HANS, HOOGENDAM CHRISTIAAN ALEXANDER, STREEFKERK BOB, BIJLAART ERIK THEODORUS MARIA, SIMON KLAUS, MERTENS JEROEN JOHANNES SOPHIA MARIA, LOOPSTRA ERIK ROELOF, KOLESNYCHENKO ALEKSEY, DONDERS SJOERD NICOLAAS LAMBERTUS, LOF JOERI, DESMIT JOANNES THEODOOR, VANSANTEN HELMAR, MEIJER HENDRICUS JOHANNES MARIA
Year of Publication 27.05.2004
Get full text
Year of Publication 27.05.2004
Patent