METHODS AND TECHNIQUES TO USE WITH PHOTOSENSITIZED CHEMICALLY AMPLIFIED RESIST CHEMICALS AND PROCESSES
RATHSACK BENJAMEN M, NAGAHARA SEIJI, HOOGE JOSHUA S, CARCASI MICHAEL A
Year of Publication 08.06.2022
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Year of Publication 08.06.2022
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Year of Publication 10.06.2022
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Year of Publication 10.06.2022
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HIGH-PRECISION DISPENSE SYSTEM WITH MENISCUS CONTROL
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Year of Publication 24.06.2022
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Year of Publication 24.06.2022
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HIGH-PURITY DISPENSE SYSTEM
HETZER DAVID, HULI LIOR, DEVILLIERS ANTON J, TRAVIS DAVID, GROOTEGOED JAMES, JACOBSON NORMAN A. JR, ROBISON RODNEY L, HOOGE JOSHUA S, NASMAN RONALD
Year of Publication 08.02.2022
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Year of Publication 08.02.2022
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기판 배면 텍스처링
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Year of Publication 25.04.2018
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Year of Publication 25.04.2018
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스핀-온-카본 평탄화 기술
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Year of Publication 12.01.2018
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Year of Publication 12.01.2018
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COVER PLATE FOR DEFECT CONTROL IN SPIN COATING PROCESS
ICHINO KATSUNORI, PRINTZ WALLACE P, HOOGE JOSHUA S, YOSHIHARA KOUSUKE, BASSETT DEREK W, TERASHITA YUICHI
Year of Publication 31.10.2016
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Year of Publication 31.10.2016
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METHODS AND TECHNIQUES TO USE WITH PHOTOSENSITIZED CHEMICALLY AMPLIFIED RESIST CHEMICALS AND PROCESSES
RATHSACK BENJAMEN M, NAGAHARA SEIJI, HOOGE JOSHUA S, CARCASI MICHAEL A
Year of Publication 28.10.2016
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Year of Publication 28.10.2016
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HIGH-PRECISION DISPENSE SYSTEM WITH MENISCUS CONTROL
HETZER DAVID, HULI LIOR, DEVILLIERS ANTON J, TRAVIS DAVID, GROOTEGOED JAMES, JACOBSON NORMAN A. JR, ROBISON RODNEY L, HOOGE JOSHUA S, NASMAN RONALD
Year of Publication 21.02.2018
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Year of Publication 21.02.2018
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HIGH-PURITY DISPENSE SYSTEM
HETZER DAVID, HULI LIOR, DEVILLIERS ANTON J, TRAVIS DAVID, GROOTEGOED JAMES, JACOBSON NORMAN A. JR, ROBISON RODNEY L, HOOGE JOSHUA S, NASMAN RONALD
Year of Publication 21.02.2018
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Year of Publication 21.02.2018
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Cover plate for wind mark control in spin coating process
Hooge, Joshua S, Yoshihara, Kousuke, Bassett, Derek W, Ichino, Katsunori, Printz, Wallace P, Terashita, Yuichi
Year of Publication 16.04.2019
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Year of Publication 16.04.2019
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High-purity dispense system
deVilliers, Anton J, Travis, David, Hooge, Joshua S, Nasman, Ronald, Grootegoed, James, Huli, Lior, Robison, Rodney L, Jacobson, Jr., Norman A
Year of Publication 03.09.2019
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Year of Publication 03.09.2019
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High-precision dispense system with meniscus control
deVilliers, Anton J, Travis, David, Hooge, Joshua S, Hetzer, David, Nasman, Ronald, Grootegoed, James, Huli, Lior, Robison, Rodney L, Jacobson, Jr., Norman A
Year of Publication 16.07.2019
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Year of Publication 16.07.2019
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