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n-type Polycrystalhne Si Thick Films Deposited on SiN_x-coated Metallurgical Grade Si Substrates
by
Hongliang Zhang Liqiang Zhu Liqiang Guo Yanghui Liu Qing Wan
Published in
材料科学技术学报：英文版
(2015)
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engineering
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chemical
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deposition;metallurgical
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thermal
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vapor
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