Search Results - "Hong, Sang-Jeen" :: K.UTB vyhledávací portál

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In-situ process monitoring for eco-friendly chemical vapor deposition chamber cleaning

by An, Su-Rin, Choi, Jeong Eun, Hong, Sang Jeen
Published in Journal of the Korean Physical Society (01.12.2021)

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Planar heating chuck to improve temperature uniformity of plasma processing equipment

by Im, Dong-Hyeok, Min, Woo-Sig, Hong, Sang-Jeen
Published in Japanese Journal of Applied Physics (01.06.2020)

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Fabrication of Planar Heating Chuck Using Nichrome Thin Film as Heating Element for PECVD Equipment

by Im, Dong-Hyeok, Yoon, Tae-Woong, Min, Woo-Sig, Hong, Sang-Jeen
Published in Electronics (Basel) (18.10.2021)

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Use of Hard Mask for Finer (<10 μm) Through Silicon Vias (TSVs) Etching

by Choi, Somang, Hong, Sang Jeen
Published in Transactions on electrical and electronic materials (2015)

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Thermal and Electrical Analysis of the Electrostatic Chuck for the Etch Equipment

by Yoon, Tae Woong, Choi, Minsuk, Hong, Sang Jeen
Published in IEEE transactions on semiconductor manufacturing (01.11.2023)

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Use of Plasma Information in Machine-Learning-Based Fault Detection and Classification for Advanced Equipment Control

by Kim, Dong Hwan, Hong, Sang Jeen
Published in IEEE transactions on semiconductor manufacturing (01.08.2021)

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Eco-Friendly Dry-Cleaning and Diagnostics of Silicon Dioxide Deposition Chamber

by An, Surin, Choi, Jeong Eun, Kang, Ju Eun, Lee, Jiseok, Hong, Sang Jeen
Published in IEEE transactions on semiconductor manufacturing (01.05.2024)

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Use of Optical Emission Spectroscopy Data for Fault Detection of Mass Flow Controller in Plasma Etch Equipment

by Kwon, Hyukjoon, Hong, Sang Jeen
Published in Electronics (Basel) (01.01.2022)

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Equipment Condition Monitoring of Multiple Oxide-Nitride Stack Layer Deposition Process

by Kim, Min Ho, Hong, Sang Jeen
Published in IEEE transactions on semiconductor manufacturing (01.11.2023)

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Industrial Internet of Things for Condition Monitoring and Diagnosis of Dry Vacuum Pumps in Atomic Layer Deposition Equipment

by Lee, Yongho, Kim, Chanyoung, Hong, Sang Jeen
Published in Electronics (Basel) (01.02.2022)

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Hands-On Experience-Based Comprehensive Curriculum for Microelectronics Manufacturing Engineering Education

by Ha, Taemin, Hong, Sang Jeen
Published in Transactions on electrical and electronic materials (25.10.2016)

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Generative Adversarial Network-Based Fault Detection in Semiconductor Equipment with Class-Imbalanced Data

by Choi, Jeong Eun, Seol, Da Hoon, Kim, Chan Young, Hong, Sang Jeen
Published in Sensors (Basel, Switzerland) (08.02.2023)

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Chemical reaction mechanism of plasma scrubber for by-product treatment in TiN-atomic layer deposition processes

by Lee, Seonbyul, Jo, Seyun, Hong, Sang Jeen
Published in Japanese Journal of Applied Physics (01.07.2022)

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Spectroscopic Analysis of NF3 Plasmas with Oxygen Additive for PECVD Chamber Cleaning

by An, Surin, Hong, Sang Jeen
Published in Coatings (Basel) (01.01.2023)

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Artificial Immune System for Fault Detection and Classification of Semiconductor Equipment

by Park, Hyoeun, Choi, Jeong Eun, Kim, Dohyun, Hong, Sang Jeen
Published in Electronics (Basel) (01.04.2021)

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In situ monitoring of plasma ignition step during photoresist stripping using O2/N2 and O2/Ar

by Kim, Kyung Eon, Kang, Ju Eun, Hong, Sang Jeen
Published in Journal of the Korean Physical Society (2023)

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Virtual Metrology for Etch Profile in Silicon Trench Etching With SF₆/O₂/Ar Plasma

by Choi, Jeong Eun, Park, Hyoeun, Lee, Yongho, Hong, Sang Jeen
Published in IEEE transactions on semiconductor manufacturing (01.02.2022)

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Surface Analysis of Aluminum Bonding Pads in Flash Memory Multichip Packaging

by Son, Dong Ju, Hong, Sang Jeen
Published in Transactions on electrical and electronic materials (2014)

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IOT-based in situ condition monitoring of semiconductor fabrication equipment for e-maintenance

by Lee, Youn Ji, Kwon, Hyuk Jun, Seok, Yujin, Hong, Sang Jeen
Published in Journal of quality in maintenance engineering (11.10.2022)

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Influence of Flow Rates and Flow Times of Plasma-Enhanced Atomic Layer Deposition Purge Gas on TiN Thin Film Properties

by Kang, Ju Eun, An, Surin, Hong, Sang Jeen
Published in Coatings (Basel) (01.06.2024)

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